Size classification of airborne particle for air-based lab-on-a-chip using micromachined electrical mobility analyzer

Soon myung Kwon, Yong Ho Kim, Il Hyun Jung, Dongho Park, Jungho Hwang, Yong-Jun Kim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This paper reports a micromachined nano-electrical mobility analyzer (NEMA) for classifying nano-sized airborne particles. The micromachined NEMA is able to classify particles by using both their inertia and electrical mobility. A micro-channel structure of the NEMA was defined by silicon bulk micromachining, and an electrode pair was deposited on the micro-channel. When electric potentials were applied to the electrodes, the electric mobility of the particles is different, which makes the particles classified according to their size. The fabricated device was characterized through classifying solid NaCl particles whose diameters were less than 100 nm and from the measurement; the collection efficiency of the NEMA was obtained for a particle of 40 nm in diameter, the highest collection efficiency was obtained at 70 V. Crown

Original languageEnglish
JournalCurrent Applied Physics
Volume9
Issue number4 SUPPL.
DOIs
Publication statusPublished - 2009 Jul 1

Fingerprint

Lab-on-a-chip
analyzers
chips
Electrodes
air
Micromachining
Silicon
Air
classifying
Electric potential
electrodes
micromachining
inertia
electric potential
silicon

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

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abstract = "This paper reports a micromachined nano-electrical mobility analyzer (NEMA) for classifying nano-sized airborne particles. The micromachined NEMA is able to classify particles by using both their inertia and electrical mobility. A micro-channel structure of the NEMA was defined by silicon bulk micromachining, and an electrode pair was deposited on the micro-channel. When electric potentials were applied to the electrodes, the electric mobility of the particles is different, which makes the particles classified according to their size. The fabricated device was characterized through classifying solid NaCl particles whose diameters were less than 100 nm and from the measurement; the collection efficiency of the NEMA was obtained for a particle of 40 nm in diameter, the highest collection efficiency was obtained at 70 V. Crown",
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Size classification of airborne particle for air-based lab-on-a-chip using micromachined electrical mobility analyzer. / Kwon, Soon myung; Kim, Yong Ho; Jung, Il Hyun; Park, Dongho; Hwang, Jungho; Kim, Yong-Jun.

In: Current Applied Physics, Vol. 9, No. 4 SUPPL., 01.07.2009.

Research output: Contribution to journalArticle

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AU - Kwon, Soon myung

AU - Kim, Yong Ho

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AU - Kim, Yong-Jun

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