Size classification of airborne particle for air-based lab-on-a-chip using micromachined electrical mobility analyzer

Soon myung Kwon, Yong Ho Kim, Il Hyun Jung, Dongho Park, Jungho Hwang, Yong Jun Kim

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4 Citations (Scopus)

Abstract

This paper reports a micromachined nano-electrical mobility analyzer (NEMA) for classifying nano-sized airborne particles. The micromachined NEMA is able to classify particles by using both their inertia and electrical mobility. A micro-channel structure of the NEMA was defined by silicon bulk micromachining, and an electrode pair was deposited on the micro-channel. When electric potentials were applied to the electrodes, the electric mobility of the particles is different, which makes the particles classified according to their size. The fabricated device was characterized through classifying solid NaCl particles whose diameters were less than 100 nm and from the measurement; the collection efficiency of the NEMA was obtained for a particle of 40 nm in diameter, the highest collection efficiency was obtained at 70 V. Crown

Original languageEnglish
Pages (from-to)e308-e310
JournalCurrent Applied Physics
Volume9
Issue number4 SUPPL.
DOIs
Publication statusPublished - 2009 Jul 1

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)

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