This paper reports a micromachined nano-electrical mobility analyzer (NEMA) for classifying nano-sized airborne particles. The micromachined NEMA is able to classify particles by using both their inertia and electrical mobility. A micro-channel structure of the NEMA was defined by silicon bulk micromachining, and an electrode pair was deposited on the micro-channel. When electric potentials were applied to the electrodes, the electric mobility of the particles is different, which makes the particles classified according to their size. The fabricated device was characterized through classifying solid NaCl particles whose diameters were less than 100 nm and from the measurement; the collection efficiency of the NEMA was obtained for a particle of 40 nm in diameter, the highest collection efficiency was obtained at 70 V. Crown
Bibliographical noteFunding Information:
This research was supported by the MKE (The Ministry of Knowledge Economy), Korea, under the ITRC (Information Technology Research Center) support program supervised by the IITA (Institute of Information Technology Assessment) (IITA-2009-C1090-0902-0038) and the National Core Research Center (NCRC) of Yonsei University.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Physics and Astronomy(all)