Soft imprinting lithography for multi-domain alignment layers in liquid crystal devices

Ji Y. Chun, Dae Shik Seo

Research output: Contribution to journalArticle

Abstract

We describe molecular-scale soft nanoimprint lithographic replication of rubbed poly(dimethylsiloxane) (PDMS) substrates to form alignment layers for liquid crystal (LC) devices. Systematic studies of the surface relief morphology of the PDMS and molded structures in three different rubbing strength illustrate good lithographic fidelity down to relief heights of several nanometers, and with some capabilities at the level of 1 nm. Collective results of experiments for molds and molded materials and process conditions indicate that this molecular scale fidelity in replication can be used to produce surfaces that will effectively align LC molecules. It has been demonstrated that the PDMS nano groove pattern has a comparable influence on LC alignment to the conventional rubbing process. It has been also shown that the artificial topography of the line grooves on the conventionally PDMS surface has a significant influence on the anchoring stability of the LC molecules. # 2010 The Japan Society of Applied Physics.

Original languageEnglish
Pages (from-to)402101-402103
Number of pages3
JournalJapanese Journal of Applied Physics
Volume49
Issue number4 PART 1
DOIs
Publication statusPublished - 2010 Apr 1

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Polydimethylsiloxane
Liquid crystals
Lithography
lithography
liquid crystals
alignment
grooves
Molecules
Molds
Topography
molecules
Japan
topography
Physics
physics
Substrates
Experiments

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

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abstract = "We describe molecular-scale soft nanoimprint lithographic replication of rubbed poly(dimethylsiloxane) (PDMS) substrates to form alignment layers for liquid crystal (LC) devices. Systematic studies of the surface relief morphology of the PDMS and molded structures in three different rubbing strength illustrate good lithographic fidelity down to relief heights of several nanometers, and with some capabilities at the level of 1 nm. Collective results of experiments for molds and molded materials and process conditions indicate that this molecular scale fidelity in replication can be used to produce surfaces that will effectively align LC molecules. It has been demonstrated that the PDMS nano groove pattern has a comparable influence on LC alignment to the conventional rubbing process. It has been also shown that the artificial topography of the line grooves on the conventionally PDMS surface has a significant influence on the anchoring stability of the LC molecules. # 2010 The Japan Society of Applied Physics.",
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Soft imprinting lithography for multi-domain alignment layers in liquid crystal devices. / Chun, Ji Y.; Seo, Dae Shik.

In: Japanese Journal of Applied Physics, Vol. 49, No. 4 PART 1, 01.04.2010, p. 402101-402103.

Research output: Contribution to journalArticle

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