Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition

Han Bo Ram Lee, Gil Ho Gu, Jong Yeog Son, Chan Gyung Park, Hyungjun Kim

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO2 and Si substrates by using metal-organic precursors and an NH3 plasma mixed with a suitable amount of SiH4 as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm the magnetic anisotropy of Co NRs caused by shape anisotropy.

Original languageEnglish
Pages (from-to)2247-2254
Number of pages8
JournalSmall
Volume4
Issue number12
DOIs
Publication statusPublished - 2008 Dec 1

Fingerprint

Nanotubes
Atomic layer deposition
Nanorods
Metals
Plasmas
Anisotropy
Magnetic anisotropy
SQUIDs
Magnetometers
Fabrication
Equipment and Supplies
Catalysts
Substrates
Growth

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Biomaterials
  • Engineering (miscellaneous)

Cite this

Lee, Han Bo Ram ; Gu, Gil Ho ; Son, Jong Yeog ; Park, Chan Gyung ; Kim, Hyungjun. / Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition. In: Small. 2008 ; Vol. 4, No. 12. pp. 2247-2254.
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Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition. / Lee, Han Bo Ram; Gu, Gil Ho; Son, Jong Yeog; Park, Chan Gyung; Kim, Hyungjun.

In: Small, Vol. 4, No. 12, 01.12.2008, p. 2247-2254.

Research output: Contribution to journalArticle

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