Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition

Han Bo Ram Lee, Gil Ho Gu, Jong Yeog Son, Chan Gyung Park, Hyungjun Kim

Research output: Contribution to journalArticle

33 Citations (Scopus)


A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO2 and Si substrates by using metal-organic precursors and an NH3 plasma mixed with a suitable amount of SiH4 as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm the magnetic anisotropy of Co NRs caused by shape anisotropy.

Original languageEnglish
Pages (from-to)2247-2254
Number of pages8
Issue number12
Publication statusPublished - 2008 Dec 1


All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)

Cite this