Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition

Han Bo Ram Lee; Gil Ho Gu; Jong Yeog Son; Chan Gyung Park; Hyungjun Kim

doi:10.1002/smll.200801074

Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition

Han Bo Ram Lee, Gil Ho Gu, Jong Yeog Son, Chan Gyung Park, Hyungjun Kim

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

36 Citations (Scopus)

Abstract

A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO₂ and Si substrates by using metal-organic precursors and an NH₃ plasma mixed with a suitable amount of SiH₄ as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm the magnetic anisotropy of Co NRs caused by shape anisotropy.

Original language	English
Pages (from-to)	2247-2254
Number of pages	8
Journal	Small
Volume	4
Issue number	12
DOIs	https://doi.org/10.1002/smll.200801074
Publication status	Published - 2008 Dec

All Science Journal Classification (ASJC) codes

Biotechnology
Biomaterials
Chemistry(all)
Materials Science(all)

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10.1002/smll.200801074

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@article{2759732dcc7a498d9c6bdc903ed33c8b,

title = "Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition",

abstract = "A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO2 and Si substrates by using metal-organic precursors and an NH3 plasma mixed with a suitable amount of SiH4 as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm the magnetic anisotropy of Co NRs caused by shape anisotropy.",

author = "Lee, {Han Bo Ram} and Gu, {Gil Ho} and Son, {Jong Yeog} and Park, {Chan Gyung} and Hyungjun Kim",

year = "2008",

month = dec,

doi = "10.1002/smll.200801074",

language = "English",

volume = "4",

pages = "2247--2254",

journal = "Small",

issn = "1613-6810",

publisher = "Wiley-VCH Verlag",

number = "12",

}

TY - JOUR

T1 - Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition

AU - Lee, Han Bo Ram

AU - Gu, Gil Ho

AU - Son, Jong Yeog

AU - Park, Chan Gyung

AU - Kim, Hyungjun

PY - 2008/12

Y1 - 2008/12

N2 - A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO2 and Si substrates by using metal-organic precursors and an NH3 plasma mixed with a suitable amount of SiH4 as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm the magnetic anisotropy of Co NRs caused by shape anisotropy.

AB - A novel fabrication method of Co and Ni metal nanorods (NRs) without catalyst or template, based on the spontaneous formation of NRs during plasma-enhanced atomic layer deposition (PE-ALD) is developed. Pure Co and Ni NRs 9-10 nm in diameter are synthesized on SiO2 and Si substrates by using metal-organic precursors and an NH3 plasma mixed with a suitable amount of SiH4 as a reactant. The lengths of the NRs are controlled on the nanometer scale by changing the number of PE-ALD growth cycles. Superconducting quantum interference device magnetometer measurements confirm the magnetic anisotropy of Co NRs caused by shape anisotropy.

UR - http://www.scopus.com/inward/record.url?scp=57349146594&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=57349146594&partnerID=8YFLogxK

U2 - 10.1002/smll.200801074

DO - 10.1002/smll.200801074

M3 - Article

C2 - 18973220

AN - SCOPUS:57349146594

SN - 1613-6810

VL - 4

SP - 2247

EP - 2254

JO - Small

JF - Small

IS - 12

ER -

Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition

Abstract

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