Step-wise Ag thin film patterns fabricated by holographic lithography

Hyunkwon Shin, Hyunjun Kim, Ki Soo Lim, Myeongkyu Lee

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A laser-induced thermo-elastic removal was used to pattern nanostructured silver thin films solution-deposited on the glass substrate. We show that sharp-edged patterns can be fabricated under an interference-generated gradual intensity profile. The etching behavior and the resulting pattern morphology were very sensitive to the cohesion of the film and its adhesion to the substrate, being both modified by the post-deposition annealing process. The fabrication of step-wise one-dimensional (1D) and 2D patterns at the micrometer scales is demonstrated by holographic lithography using an Nd:YAG pulsed laser, along with a discussion on the effect of film cohesion and adhesion.

Original languageEnglish
Pages (from-to)3273-3275
Number of pages3
JournalThin Solid Films
Volume517
Issue number11
DOIs
Publication statusPublished - 2009 Apr 2

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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