Strain characterization of fin-shaped field effect transistors with SiGe stressors using nanobeam electron diffraction

Sun Wook Kim, Dae Seop Byeon, Hyunchul Jang, Sang Mo Koo, Hoo Jeong Lee, Dae Hong Ko

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

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Physics & Astronomy