Direct-patternable lead zirconate titanate (PZT) film was prepared by sol-gel technique using orth-nitrobenzaldehyde as a photosensitive agent. For applying this direct-patternable PZT ferroelectric film to micro electromechanical system, a development of stress in the film was investigated by modifying the anneal condition and the constituents of PZT sol. The residual stress in the conventional and modified (for stress-release) direct-patternable PZT films was investigated by the Raman spectroscopy. In addition, ferroelectric properties of modified PZT film were compared with those of conventional film. Finally, we assess the applying feasibility of direct-patternable PZT film to micro-detecting system.
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Acknowledgments This research has been supported by the Intelligent Microsystem Center (IMC: http://www.microsystem.re.kr), which carries out one of the 21st century’s Frontier R&D Projects sponsored by the Korea Ministry of Science and Technology.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Condensed Matter Physics
- Mechanics of Materials
- Electrical and Electronic Engineering
- Materials Chemistry