Structural and electrical properties of co-sputtered fluorinated amorphous carbon film

Hae suk Jung, Hyung Ho Park

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

Fluorinated amorphous carbon (a-C:F) films were deposited by co-sputtering process using polytetrafluoroethylene and graphite targets. The deposition characteristics, bonding configuration, structure, and electrical properties of a-C:F films were investigated as a function of fluorine content in the range of 0-62 at.%. As the fluorine content increased, transformation of bonding configuration and micro-structure were observed. For the fluorine content below 22 at.%, fluorine in amorphous carbon did not significantly affect hybrid bonding configuration. However, with increasing fluorine content, C - CFx and C - CF1 bonds were dominated and a further increase in fluorine content resulted in the formation of C - CF2 and C - CF3 bonds and then dielectric constant decreased from 10 to 2.7. Based on these results, correlations among bonds' distribution, micro-structure and dielectric property of a-C:F films were established.

Original languageEnglish
Pages (from-to)248-252
Number of pages5
JournalThin Solid Films
Volume420-421
DOIs
Publication statusPublished - 2002 Dec 2

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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