Structural and Electrical Properties of EOT HfO2 (<1 nm) Grown on InAs by Atomic Layer Deposition and Its Thermal Stability

Yu Seon Kang, Hang Kyu Kang, Dae Kyoung Kim, Kwang Sik Jeong, Min Baik, Youngseo An, Hyoungsub Kim, Jin Dong Song, Mann Ho Cho

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16 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds