Structural and electron field emission characteristics of pulsed laser deposited diamond-like carbon films with thermal treatment

Hae Suk Jung, Hyung-Ho Park, Seong Sik Pang, Sang Yeol Lee

Research output: Contribution to journalConference article

19 Citations (Scopus)

Abstract

Diamond-like carbon (DLC) films have been deposited on Si(100) by pulsed laser deposition (PLD) using 355 nm (Nd:YAG) laser. In order to investigate the factor that dominates the electron field emission behavior of DLC film, structural and electrical properties have been studied as a function of anneal temperature. Degradation of DLC film properties began to be observed above 400 °C but, in case of plasmon energy loss and emission behavior, there were variations of properties at 300 °C. From these results, we are convinced that anneal treatment modifies sp3/sp2 bonding ratio in surface as well as bulk of film but the anneal effect is more intensified on the surface than the bulk of DLC film. It is also observed that the electron field emission property is affected by the modification of sp3/sp2 bonding ratio in the film surface.

Original languageEnglish
Pages (from-to)151-156
Number of pages6
JournalThin Solid Films
Volume355
DOIs
Publication statusPublished - 1999 Nov 1
EventProceedings of the 1999 26th International Conference on Metallurgic Coatings and Thin Films - San Diego, CA, USA
Duration: 1999 Apr 121999 Apr 15

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this