Structural and optical properties of non-polar A-plane ZnO films grown on R-plane sapphire substrates by plasma-assisted molecular-beam epitaxy

S. K. Han, S. K. Hong, J. W. Lee, J. Y. Lee, J. H. Song, Y. S. Nam, S. K. Chang, T. Minegishi, T. Yao

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Non-polar, A-plane (1 1 over(2, -) 0) ZnO films are epitaxially grown on R-plane (1 over(1, -) 0 2) Al2O3 substrates by plasma-assisted molecular-beam epitaxy and structural and optical properties are investigated. Epitaxial relationships between ZnO films and Al2O3 substrates are determined to be ZnO(1 1 over(2, -) 0) / / Al2 O3 (1 over(1, -) 2 0), ZnO[over(1, -) 1 0 0] / / Al2 O3 [1 1 over(2, -) 0]. The misfit is relaxed by the regularly spaced misfit dislocations. Structural properties are anisotropic and surfaces of films show stripes running along the ZnO [0 0 0 1] direction. Full width at half maximums of X-ray rocking curves for the on-axis (1 1 over(2, -) 0) with φ=0° and 90°, and the off-axis (1 0 over(1, -) 1) reflections are 0.41°, 0.36°, and 0.39°, respectively, for the 300 nm-thick ZnO film. Near-band edge emissions are dominant in low-temperature (12 K) photoluminescence while emissions from deep levels are negligible indicating a high optical quality of the layers. The near-band edge emissions are strongly polarized perpendicular to the [0 0 0 1] axis. Transitions of neutral-donor bound excitons (D0X) and allowed free excitons are observed in photoluminescence and photoreflectance spectra, which are significantly blue-shifted compared to the transitions in C-plane ZnO.

Original languageEnglish
Pages (from-to)121-127
Number of pages7
JournalJournal of Crystal Growth
Issue number2
Publication statusPublished - 2007 Dec 1


All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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