Structural evolution and the control of defects in atomic layer deposited HfO2-Al2O3 stacked films on GaAs

Yu Seon Kang, Dae Kyoung Kim, Kwang Sik Jeong, Mann Ho Cho, Chung Yi Kim, Kwun Bum Chung, Hyoungsub Kim, Dong Chan Kim

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31 Citations (Scopus)

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