Structural feature-based fault-detection approach for the recipes of similar products

Jong Myoung Ko, Chang Ouk Kim, Seung Jun Lee, Joo Pyo Hong

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The sensor signals (i.e., data streams of process parameters) of semiconductor processes exhibit nonlinear, multimodal trajectories with some common structural features. In this paper, we propose a process fault-detection approach based on the structural features of the sensor signals, such as the geometric shape, length, and height. The approach aims at constructing a shared univariate model and a multivariate model. The shared univariate model is set up for individual process parameters and clusters the process recipes of similar products. The result is a tree where the leaf nodes and intermediate nodes correspond to individual recipes and feature-based fault-detection criteria, respectively. The recipes with the same parent nodes share the criteria specified in the nodes. On the other hand, the multivariate model is constructed for a process recipe. It builds a Hotelling's T2 that considers the correlations between the signal structures of the process parameters. We demonstrated that the test results of the two models using the data collected from a work-site etch process were encouraging.

Original languageEnglish
Article number5431000
Pages (from-to)273-283
Number of pages11
JournalIEEE Transactions on Semiconductor Manufacturing
Volume23
Issue number2
DOIs
Publication statusPublished - 2010 May 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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