Energetic oxygen ion bombardment induces densification and enhances the film crystallinity and refractive index of the evaporated MgO thin films. The optimum oxygen ion bombardment energy is 100 eV and its energy shows have the highest crystallinity and optical properties. The oxygen ion bombardment affects the optical properties that are dependent on the structural properties of the MgO thin films. The ion-induced secondary electron emission property is enhanced more by the cesium incorporation than by the ion beam assisted deposition. This phenomenon is a combined effect of densification of the structure and the reduction of the surface work function.
|Number of pages||5|
|Journal||Thin Solid Films|
|Publication status||Published - 1999 Nov 1|
|Event||Proceedings of the 1999 26th International Conference on Metallurgic Coatings and Thin Films - San Diego, CA, USA|
Duration: 1999 Apr 12 → 1999 Apr 15
Bibliographical noteFunding Information:
This work was sponsored by the academic research fund of Ministry of Education, Republic of Korea.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry