Study of the growth of biaxially textured CeO2 films during ion-beam-assisted deposition

Chang Su Kim, Sung Jin Jo, Soon Moon Jeong, Woo Jin Kim, Hong Koo Baik, Se Jong Lee, Kie Moon Song

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Biaxially textured CeO2 films were deposited on Hastelloy C276 substrates at room temperature using ion-beam-assisted e-beam evaporation with the ion beam directed at 55° to the normal of the film plane. The crystalline structure and in-plane orientation of films were investigated by x-ray diffraction 2θ -scan and φ-scan. The orientation of the films was studied as a function of ion-to-atom ratio and film thickness. The ion-to-atom ratio was varied by independently adjusting the deposition rate and the ion current density. Under optimum condition, (200) textured CeO2 films have been successfully grown on Hastelloy C276.

Original languageEnglish
Pages (from-to)330-333
Number of pages4
JournalSuperconductor Science and Technology
Issue number3
Publication statusPublished - 2005 Mar

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Condensed Matter Physics
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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