Study on compensation of thermal stresses in the fabrication process of thin-film transistor

Engineering & Materials Science

• Annealing 38%
• Compensation and Redress 59%
• Ethers 22%
• Fabrication 57%
• Heat treatment 17%
• Masks 18%
• Polycarbonates 23%
• Polymers 28%
• Substrates 55%
• Temperature 15%
• Thermal effects 19%
• Thermal expansion 19%
• Thermal stress 77%
• Thin film transistors 100%
• Thin films 18%

Physics & Astronomy

• annealing 23%
• coefficients 10%
• critical temperature 17%
• elimination 19%
• ethers 21%
• fabrication 47%
• guy wires 21%
• masks 16%
• polycarbonates 21%
• polymers 22%
• sulfones 29%
• temperature 5%
• temperature effects 17%
• thermal expansion 16%
• thermal stresses 82%
• thin films 40%
• transistors 62%