Study on modified silicon surface after CHF3/C2F6 reactive ion etching

Hyung Ho Park, Kwang Ho Kwon, Sang Hwan Lee, Byung Hwa Koak, Sahn Nahm, Hee Tae Lee, Kyoung Ik Cho, Oh Joon Kwon, Young II Kang

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

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Engineering & Materials Science

Chemistry