Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition

Hyeong Ho Park, Hyung Ho Park, Ho Jung Chang, Hyeongtag Jeon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated. The observation of surface microstructure showed that UV irradiation and increase in anneal temperature induced the grain growth of SBT. The measured remnant polarization values of UV irradiated and non-irradiated SBT films after anneal at 700°C were 5.8 and 4.7 μC/cm2 and after anneal at 750°C, the values were 10.8 and 9.3 μC/cm2, respectively.

Original languageEnglish
Title of host publicationEco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design
Pages1061-1064
Number of pages4
Publication statusPublished - 2007 Dec 1
Event8th International Symposium on Eco-Materials Processing and Design, ISEPD-8 - Kitakyushu, Japan
Duration: 2007 Jan 112007 Jan 13

Publication series

NameMaterials Science Forum
Volume544-545
ISSN (Print)0255-5476

Other

Other8th International Symposium on Eco-Materials Processing and Design, ISEPD-8
CountryJapan
CityKitakyushu
Period07/1/1107/1/13

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Park, H. H., Park, H. H., Chang, H. J., & Jeon, H. (2007). Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition. In Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design (pp. 1061-1064). (Materials Science Forum; Vol. 544-545).