Suppression of nickel-germanide (NiGe) agglomeration and Ni penetration by hydrogen (H) ion shower doping in NiGe on a thin epitaxial Ge-on-Si substrate

Min Ho Kang, Ying Ying Zhang, Kee Young Park, Shi Guang Li, Soon Yen Jung, Ga Won Lee, Jin Suk Wang, Hi Deok Lee, Jung Woo Oh, Prashant Majhi, Raj Jammy, Kun Joo Park

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Physics & Astronomy