Suppression of oxidation of metal emitters by incorporating ruthenium oxide

Young Joon Yoon, Dong Soo Yoon, Hong Koo Baik, Sung Man Lee, Kie Moon Song, Se Jong Lee

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The applicability of the RuO2 incorporated metal emitters for the cathode of the field emission display (FED) was investigated. The RuO2 incorporated Ta film showed an amorphous structure for the as-deposited state and formed a conductive RuO2 phase after annealing without a change in the amorphous structure. This structure could prevent both oxygen indiffusion and oxide formation for the metal matrix, sufficiently, due to the strong bonds of Ta-O or Ta-Ru-O.

Original languageEnglish
Pages (from-to)972-975
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number2
DOIs
Publication statusPublished - 2000 Mar 1

Fingerprint

Ruthenium
ruthenium
emitters
retarding
Field emission displays
Oxidation
oxidation
Oxides
oxides
Metals
metals
field emission
Cathodes
cathodes
Annealing
annealing
Oxygen
oxygen
matrices

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Yoon, Young Joon ; Yoon, Dong Soo ; Baik, Hong Koo ; Lee, Sung Man ; Song, Kie Moon ; Lee, Se Jong. / Suppression of oxidation of metal emitters by incorporating ruthenium oxide. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2000 ; Vol. 18, No. 2. pp. 972-975.
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Suppression of oxidation of metal emitters by incorporating ruthenium oxide. / Yoon, Young Joon; Yoon, Dong Soo; Baik, Hong Koo; Lee, Sung Man; Song, Kie Moon; Lee, Se Jong.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 18, No. 2, 01.03.2000, p. 972-975.

Research output: Contribution to journalArticle

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AU - Lee, Se Jong

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