Suppression of surface waves using the micromachining technique

Jung Gwan Yook, L. P.B. Katehi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.

Original languageEnglish
Title of host publicationIEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas
Subtitle of host publicationGateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages652-655
Number of pages4
ISBN (Print)0780344782, 9780780344785
DOIs
Publication statusPublished - 1998 Jan 1
Event1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998 - Atlanta, United States
Duration: 1998 Jun 211998 Jun 26

Publication series

NameIEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting
Volume2

Other

Other1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998
CountryUnited States
CityAtlanta
Period98/6/2198/6/26

Fingerprint

Micromachining
micromachining
Surface waves
surface waves
retarding
patch antennas
Substrates
Microstrip antennas
Silicon
silicon
Millimeter waves
millimeter waves
Permittivity
antennas
Microwaves
permittivity
Antennas
bandwidth
Bandwidth
microwaves

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Radiation
  • Computer Networks and Communications
  • Electrical and Electronic Engineering

Cite this

Yook, J. G., & Katehi, L. P. B. (1998). Suppression of surface waves using the micromachining technique. In IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting (pp. 652-655). [702022] (IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/APS.1998.702022
Yook, Jung Gwan ; Katehi, L. P.B. / Suppression of surface waves using the micromachining technique. IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting. Institute of Electrical and Electronics Engineers Inc., 1998. pp. 652-655 (IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting).
@inproceedings{0927bf8773d441eaaef624eede813fbf,
title = "Suppression of surface waves using the micromachining technique",
abstract = "Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.",
author = "Yook, {Jung Gwan} and Katehi, {L. P.B.}",
year = "1998",
month = "1",
day = "1",
doi = "10.1109/APS.1998.702022",
language = "English",
isbn = "0780344782",
series = "IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "652--655",
booktitle = "IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas",
address = "United States",

}

Yook, JG & Katehi, LPB 1998, Suppression of surface waves using the micromachining technique. in IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting., 702022, IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 652-655, 1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998, Atlanta, United States, 98/6/21. https://doi.org/10.1109/APS.1998.702022

Suppression of surface waves using the micromachining technique. / Yook, Jung Gwan; Katehi, L. P.B.

IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting. Institute of Electrical and Electronics Engineers Inc., 1998. p. 652-655 702022 (IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Suppression of surface waves using the micromachining technique

AU - Yook, Jung Gwan

AU - Katehi, L. P.B.

PY - 1998/1/1

Y1 - 1998/1/1

N2 - Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.

AB - Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.

UR - http://www.scopus.com/inward/record.url?scp=0031621176&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031621176&partnerID=8YFLogxK

U2 - 10.1109/APS.1998.702022

DO - 10.1109/APS.1998.702022

M3 - Conference contribution

AN - SCOPUS:0031621176

SN - 0780344782

SN - 9780780344785

T3 - IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting

SP - 652

EP - 655

BT - IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Yook JG, Katehi LPB. Suppression of surface waves using the micromachining technique. In IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting. Institute of Electrical and Electronics Engineers Inc. 1998. p. 652-655. 702022. (IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting). https://doi.org/10.1109/APS.1998.702022