Abstract
Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.
| Original language | English |
|---|---|
| Title of host publication | IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas |
| Subtitle of host publication | Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 652-655 |
| Number of pages | 4 |
| ISBN (Print) | 0780344782, 9780780344785 |
| DOIs | |
| Publication status | Published - 1998 Jan 1 |
| Event | 1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998 - Atlanta, United States Duration: 1998 Jun 21 → 1998 Jun 26 |
Publication series
| Name | IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting |
|---|---|
| Volume | 2 |
Other
| Other | 1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998 |
|---|---|
| Country | United States |
| City | Atlanta |
| Period | 98/6/21 → 98/6/26 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Instrumentation
- Radiation
- Computer Networks and Communications
- Electrical and Electronic Engineering
Cite this
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Suppression of surface waves using the micromachining technique. / Yook, Jung Gwan; Katehi, L. P.B.
IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting. Institute of Electrical and Electronics Engineers Inc., 1998. p. 652-655 702022 (IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting; Vol. 2).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Suppression of surface waves using the micromachining technique
AU - Yook, Jung Gwan
AU - Katehi, L. P.B.
PY - 1998/1/1
Y1 - 1998/1/1
N2 - Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.
AB - Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.
UR - http://www.scopus.com/inward/record.url?scp=0031621176&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0031621176&partnerID=8YFLogxK
U2 - 10.1109/APS.1998.702022
DO - 10.1109/APS.1998.702022
M3 - Conference contribution
AN - SCOPUS:0031621176
SN - 0780344782
SN - 9780780344785
T3 - IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting
SP - 652
EP - 655
BT - IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas
PB - Institute of Electrical and Electronics Engineers Inc.
ER -