Suppression of surface waves using the micromachining technique

Jung Gwan Yook; L. P.B. Katehi

doi:10.1109/APS.1998.702022

Suppression of surface waves using the micromachining technique

Jung Gwan Yook, L. P.B. Katehi

Department of Electrical and Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.

Original language	English
Title of host publication	IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas
Subtitle of host publication	Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	652-655
Number of pages	4
ISBN (Print)	0780344782, 9780780344785
DOIs	https://doi.org/10.1109/APS.1998.702022
Publication status	Published - 1998
Event	1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998 - Atlanta, United States Duration: 1998 Jun 21 → 1998 Jun 26

Publication series

Name	IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting
Volume	2

Other

Other	1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998
Country/Territory	United States
City	Atlanta
Period	98/6/21 → 98/6/26

Bibliographical note

Funding Information:
This work was partially supported by HugheslDARPA. Also, the authors would like to thank the University of Michigan Center for Parallel Computing (CPC), which is partially funded by NSF grant CDA-92-14296 and the Ford Motor Company, for the use of computational facilities.

Publisher Copyright:
© 1998 IEEE.

All Science Journal Classification (ASJC) codes

Instrumentation
Radiation
Computer Networks and Communications
Electrical and Electronic Engineering

Access to Document

10.1109/APS.1998.702022

Cite this

Yook, J. G., & Katehi, L. P. B. (1998). Suppression of surface waves using the micromachining technique. In IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting (pp. 652-655). [702022] (IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/APS.1998.702022

Yook, Jung Gwan ; Katehi, L. P.B. / Suppression of surface waves using the micromachining technique. IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting. Institute of Electrical and Electronics Engineers Inc., 1998. pp. 652-655 (IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting).

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title = "Suppression of surface waves using the micromachining technique",

abstract = "Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.",

author = "Yook, {Jung Gwan} and Katehi, {L. P.B.}",

note = "Funding Information: This work was partially supported by HugheslDARPA. Also, the authors would like to thank the University of Michigan Center for Parallel Computing (CPC), which is partially funded by NSF grant CDA-92-14296 and the Ford Motor Company, for the use of computational facilities. Publisher Copyright: {\textcopyright} 1998 IEEE.; 1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998 ; Conference date: 21-06-1998 Through 26-06-1998",

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doi = "10.1109/APS.1998.702022",

language = "English",

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series = "IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting",

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Yook, JG & Katehi, LPB 1998, Suppression of surface waves using the micromachining technique. in IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting., 702022, IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 652-655, 1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998, Atlanta, United States, 98/6/21. https://doi.org/10.1109/APS.1998.702022

Suppression of surface waves using the micromachining technique. / Yook, Jung Gwan; Katehi, L. P.B.

IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting. Institute of Electrical and Electronics Engineers Inc., 1998. p. 652-655 702022 (IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.

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Yook JG, Katehi LPB. Suppression of surface waves using the micromachining technique. In IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting. Institute of Electrical and Electronics Engineers Inc. 1998. p. 652-655. 702022. (IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting). https://doi.org/10.1109/APS.1998.702022

Suppression of surface waves using the micromachining technique

Abstract

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Bibliographical note

All Science Journal Classification (ASJC) codes

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