Silicon micromachining has been applied to build high performance microwave and millimeter-wave antennas. To suppress substrate modes and increase the bandwidth of the patch antenna, silicon substrate material has been selectively removed under the patch area. It has been shown that the new structure can effectively suppress unwanted substrate and higher order modes. Also, effective dielectric constant curves for micromachined substrates are provided for accurate design of patch antennas.
|Title of host publication||IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas|
|Subtitle of host publication||Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||4|
|ISBN (Print)||0780344782, 9780780344785|
|Publication status||Published - 1998|
|Event||1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998 - Atlanta, United States|
Duration: 1998 Jun 21 → 1998 Jun 26
|Name||IEEE Antennas and Propagation Society International Symposium, 1998 Digest - Antennas: Gateways to the Global Network - Held in conjunction with: USNC/URSI National Radio Science Meeting|
|Other||1998 IEEE Antennas and Propagation Society International Symposium, APSURSI 1998|
|Period||98/6/21 → 98/6/26|
Bibliographical noteFunding Information:
This work was partially supported by HugheslDARPA. Also, the authors would like to thank the University of Michigan Center for Parallel Computing (CPC), which is partially funded by NSF grant CDA-92-14296 and the Ford Motor Company, for the use of computational facilities.
© 1998 IEEE.
All Science Journal Classification (ASJC) codes
- Computer Networks and Communications
- Electrical and Electronic Engineering