Surface deformation of amorphous silicon thin film on elastomeric substrate

Sangwook Lee, Jungmok Seo, Ja Hoon Koo, Kyeong Ju Moon, Jae Min Myoung, Taeyoon Lee

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

Stiff thin layers on compliant substrates can generate various surface structures using equi-biaxial stress caused by large thermal expansion rate differences. We investigated the detailed understanding on the evolution of self-assembled wrinkle patterns of ultra-thin amorphous silicon (a-Si) layers on polydimethylsiloxane substrate. It turns out that the generation of various wrinkle patterns depends on the position of their orientation, film thicknesses, mechanical properties of the a-Si films, and the amount of pre-strain. The various self-assembled patterns include one-dimensional wavy patterns, randomly ordered two-dimensional structured patterns, and herringbone structures. The self-assembled wrinkles can be characterized by the wavelength and amplitude of the distinct structures: the amplitudes of the various patterns increase as the amount of pre-strain increases, while the wavelengths remain constant within our experimental ranges. The experimental results of the wavelengths and amplitudes for the wavy structured patterns of 270-nm-thick a-Si layer are in good agreement with the theoretical solutions of the single crystalline silicon (c-Si) model, which implies that the theoretical modeling of the deformation of c-Si film can be expandable to the case of a-Si film deformations.

Original languageEnglish
Pages (from-to)823-828
Number of pages6
JournalThin Solid Films
Volume519
Issue number2
DOIs
Publication statusPublished - 2010 Nov 1

Bibliographical note

Funding Information:
This work was partly supported by the IT R&D program of MKE/KEIT [ 10030517-2009-03 , Advanced CMOS image sensor using 3D integration] and by Priority Research Centers Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology [ 2009-0093823 ].

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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