Surface deformation of amorphous silicon thin film on elastomeric substrate

Sangwook Lee, Jungmok Seo, Ja Hoon Koo, Kyeong Ju Moon, Jae Min Myoung, Taeyoon Lee

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Stiff thin layers on compliant substrates can generate various surface structures using equi-biaxial stress caused by large thermal expansion rate differences. We investigated the detailed understanding on the evolution of self-assembled wrinkle patterns of ultra-thin amorphous silicon (a-Si) layers on polydimethylsiloxane substrate. It turns out that the generation of various wrinkle patterns depends on the position of their orientation, film thicknesses, mechanical properties of the a-Si films, and the amount of pre-strain. The various self-assembled patterns include one-dimensional wavy patterns, randomly ordered two-dimensional structured patterns, and herringbone structures. The self-assembled wrinkles can be characterized by the wavelength and amplitude of the distinct structures: the amplitudes of the various patterns increase as the amount of pre-strain increases, while the wavelengths remain constant within our experimental ranges. The experimental results of the wavelengths and amplitudes for the wavy structured patterns of 270-nm-thick a-Si layer are in good agreement with the theoretical solutions of the single crystalline silicon (c-Si) model, which implies that the theoretical modeling of the deformation of c-Si film can be expandable to the case of a-Si film deformations.

Original languageEnglish
Pages (from-to)823-828
Number of pages6
JournalThin Solid Films
Volume519
Issue number2
DOIs
Publication statusPublished - 2010 Nov 1

Fingerprint

Amorphous silicon
amorphous silicon
Thin films
Silicon
Substrates
thin films
Wavelength
silicon films
Crystalline materials
Polydimethylsiloxane
Surface structure
Thermal expansion
Film thickness
wavelengths
Mechanical properties
elastomeric
thermal expansion
film thickness
mechanical properties
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Lee, Sangwook ; Seo, Jungmok ; Koo, Ja Hoon ; Moon, Kyeong Ju ; Myoung, Jae Min ; Lee, Taeyoon. / Surface deformation of amorphous silicon thin film on elastomeric substrate. In: Thin Solid Films. 2010 ; Vol. 519, No. 2. pp. 823-828.
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Surface deformation of amorphous silicon thin film on elastomeric substrate. / Lee, Sangwook; Seo, Jungmok; Koo, Ja Hoon; Moon, Kyeong Ju; Myoung, Jae Min; Lee, Taeyoon.

In: Thin Solid Films, Vol. 519, No. 2, 01.11.2010, p. 823-828.

Research output: Contribution to journalArticle

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