Engineering
Amplitudes
60%
Wavelength
60%
Deformation
40%
Silicon Layer
40%
Crystalline Silicon
40%
Prestrain
40%
Substrates
40%
Experimental Result
20%
Thin Films
20%
Thin Layer
20%
Compliant Substrate
20%
Polydimethylsiloxane
20%
One Dimensional
20%
Two Dimensional
20%
Good Agreement
20%
Experimental Range
20%
Surface Deformation
20%
Models
20%
Mechanical Properties
20%
Generates
20%
Biaxial Stress
20%
Physics
Amorphous Silicon
100%
Amplitudes
60%
Silicon Films
60%
Deformation
40%
Substrates
40%
Thin Films
20%
Film Thickness
20%
Strength of Materials
20%
Thermal Expansion
20%
Model
20%
Differences
20%
Material Science
Amorphous Silicon
100%
Thin Films
20%
Solution
20%
Theoretical Modeling
20%
Mechanical Property
20%
Surface Structure
20%
Thermal Expansion
20%