Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid

Wook Bae Kim, Seung Hwan Lee, Byung-Kwon Min

Research output: Contribution to journalArticle

42 Citations (Scopus)

Abstract

A surface-finishing method for three-dimensional microchannel structures is proposed. The method utilizes magnetorheological fluid mixed with abrasives as a polishing tool. The influences of the process parameters on the material removal were investigated, and the surface topographies before and after finishing were compared. When a microchannel was finished by proposed method, the roughness of bottom and side surfaces of the silicon channel was reduced by a factor of 5-10, and the pressure drop of a gas flow through the single microchannel was lowered to 26.7% of the pressure drop in an unfinished microchannel The experimental results demonstrated that the proposed method was effective in finishing of microstructures.

Original languageEnglish
Pages (from-to)772-778
Number of pages7
JournalJournal of Manufacturing Science and Engineering, Transactions of the ASME
Volume126
Issue number4
DOIs
Publication statusPublished - 2004 Nov 1

Fingerprint

Magnetorheological fluids
Microchannels
Silicon
Pressure drop
Surface topography
Polishing
Abrasives
Flow of gases
Surface roughness
Microstructure

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

Cite this

@article{5ae0d27dfaac4ca4bd5a77b27084c1f6,
title = "Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid",
abstract = "A surface-finishing method for three-dimensional microchannel structures is proposed. The method utilizes magnetorheological fluid mixed with abrasives as a polishing tool. The influences of the process parameters on the material removal were investigated, and the surface topographies before and after finishing were compared. When a microchannel was finished by proposed method, the roughness of bottom and side surfaces of the silicon channel was reduced by a factor of 5-10, and the pressure drop of a gas flow through the single microchannel was lowered to 26.7{\%} of the pressure drop in an unfinished microchannel The experimental results demonstrated that the proposed method was effective in finishing of microstructures.",
author = "Kim, {Wook Bae} and Lee, {Seung Hwan} and Byung-Kwon Min",
year = "2004",
month = "11",
day = "1",
doi = "10.1115/1.1811113",
language = "English",
volume = "126",
pages = "772--778",
journal = "Journal of Manufacturing Science and Engineering, Transactions of the ASME",
issn = "1087-1357",
publisher = "American Society of Mechanical Engineers(ASME)",
number = "4",

}

Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid. / Kim, Wook Bae; Lee, Seung Hwan; Min, Byung-Kwon.

In: Journal of Manufacturing Science and Engineering, Transactions of the ASME, Vol. 126, No. 4, 01.11.2004, p. 772-778.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid

AU - Kim, Wook Bae

AU - Lee, Seung Hwan

AU - Min, Byung-Kwon

PY - 2004/11/1

Y1 - 2004/11/1

N2 - A surface-finishing method for three-dimensional microchannel structures is proposed. The method utilizes magnetorheological fluid mixed with abrasives as a polishing tool. The influences of the process parameters on the material removal were investigated, and the surface topographies before and after finishing were compared. When a microchannel was finished by proposed method, the roughness of bottom and side surfaces of the silicon channel was reduced by a factor of 5-10, and the pressure drop of a gas flow through the single microchannel was lowered to 26.7% of the pressure drop in an unfinished microchannel The experimental results demonstrated that the proposed method was effective in finishing of microstructures.

AB - A surface-finishing method for three-dimensional microchannel structures is proposed. The method utilizes magnetorheological fluid mixed with abrasives as a polishing tool. The influences of the process parameters on the material removal were investigated, and the surface topographies before and after finishing were compared. When a microchannel was finished by proposed method, the roughness of bottom and side surfaces of the silicon channel was reduced by a factor of 5-10, and the pressure drop of a gas flow through the single microchannel was lowered to 26.7% of the pressure drop in an unfinished microchannel The experimental results demonstrated that the proposed method was effective in finishing of microstructures.

UR - http://www.scopus.com/inward/record.url?scp=14844287006&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=14844287006&partnerID=8YFLogxK

U2 - 10.1115/1.1811113

DO - 10.1115/1.1811113

M3 - Article

VL - 126

SP - 772

EP - 778

JO - Journal of Manufacturing Science and Engineering, Transactions of the ASME

JF - Journal of Manufacturing Science and Engineering, Transactions of the ASME

SN - 1087-1357

IS - 4

ER -