Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid

Wook Bae Kim, Seung Hwan Lee, Byung Kwon Min

Research output: Contribution to journalArticle

45 Citations (Scopus)

Abstract

A surface-finishing method for three-dimensional microchannel structures is proposed. The method utilizes magnetorheological fluid mixed with abrasives as a polishing tool. The influences of the process parameters on the material removal were investigated, and the surface topographies before and after finishing were compared. When a microchannel was finished by proposed method, the roughness of bottom and side surfaces of the silicon channel was reduced by a factor of 5-10, and the pressure drop of a gas flow through the single microchannel was lowered to 26.7% of the pressure drop in an unfinished microchannel The experimental results demonstrated that the proposed method was effective in finishing of microstructures.

Original languageEnglish
Pages (from-to)772-778
Number of pages7
JournalJournal of Manufacturing Science and Engineering, Transactions of the ASME
Volume126
Issue number4
DOIs
Publication statusPublished - 2004 Nov 1

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

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