Surface-Functionalization-Mediated Direct Transfer of Molybdenum Disulfide for Large-Area Flexible Devices

Sachin M. Shinde, Tanmoy Das, Anh Tuan Hoang, Bhupendra K. Sharma, Xiang Chen, Jong-Hyun Ahn

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

The transfer of synthesized large-area 2D materials to arbitrary substrates is expected to be a vital step for the development of flexible device fabrication processes. The currently used hazardous acid-based wet chemical etching process for transferring large-area MoS 2 films is deemed to be unsuitable because it significantly degrades the material and damages growth substrates. Surface energy-assisted water-based transfer processes do not require corrosive chemicals during the transfer process; however, the concept is not investigated at the wafer scale due to a lack of both optimization and in-depth understanding. In this study, a wafer-scale water-assisted transfer process for metal–organic chemical vapor-deposited MoS 2 films based on the hydrofluoric acid treatment of a SiO 2 surface before the growth is demonstrated. Such surface treatment enhances the strongly adhering silanol groups, which allows the direct transfer of large-area, continuous, and defect-free MoS 2 films; it also facilitates the reuse of growth substrate. The developed transfer method allows direct fabrication of flexible devices without the need for a polymeric supporting layer. It is believed that the proposed method can be an alternative defect- and residue-free transfer method for the development of MoS 2 -based next-generation flexible devices.

Original languageEnglish
Article number1706231
JournalAdvanced Functional Materials
Volume28
Issue number13
DOIs
Publication statusPublished - 2018 Mar 28

Fingerprint

molybdenum disulfides
Molybdenum
Substrates
Hydrofluoric Acid
Fabrication
Caustics
Defects
Hydrofluoric acid
Water
Wet etching
Interfacial energy
Surface treatment
Vapors
Acids
wafers
fabrication
molybdenum disulfide
reuse
hydrofluoric acid
defects

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Shinde, Sachin M. ; Das, Tanmoy ; Hoang, Anh Tuan ; Sharma, Bhupendra K. ; Chen, Xiang ; Ahn, Jong-Hyun. / Surface-Functionalization-Mediated Direct Transfer of Molybdenum Disulfide for Large-Area Flexible Devices. In: Advanced Functional Materials. 2018 ; Vol. 28, No. 13.
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Surface-Functionalization-Mediated Direct Transfer of Molybdenum Disulfide for Large-Area Flexible Devices. / Shinde, Sachin M.; Das, Tanmoy; Hoang, Anh Tuan; Sharma, Bhupendra K.; Chen, Xiang; Ahn, Jong-Hyun.

In: Advanced Functional Materials, Vol. 28, No. 13, 1706231, 28.03.2018.

Research output: Contribution to journalArticle

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