The Si Mini-Pad sensor is an essential component of the MPC-EX preshower detector. This detector will be integrated into the PHENIX experiment at Brookhaven National Laboratory's Relativistic Heavy Ion Collider. We describe the development of the surface pattern and the fabrication process of the Si Mini-Pad sensor and present a test by the low energy γ irradiation that is sensitive to the surface design.
Bibliographical noteFunding Information:
The authors would like to thank TOPSIL’s silicon scientist Leif Jensen for providing detailed wafer characteristics and ARTI’s staff members for their kind assistance in the irradiation process. We acknowledge the support for the work at Brookhaven National Lab by the U.S. Department of Energy, Office of Nuclear Physics, under Prime Contract No. DE-AC02-98CH10886, at Chonbuk National University by the National Research Foundation of Korea under NRF-2011-0014045, at Ewha Womans University by the National Research Foundation of Korea under NRF-2012M7A1A2055625, at Iowa State University under DOE Grant DE-FG02-10ER41719, at Myongji University by the National Research Foundation of Korea under NRF-2013-R1A1A2011572, at Sungkyunkwan University by the ICT R&D program of MSIP/KEIT 10043897, at Xiangtan University by the Chinese 973 Program, and at Yonsei University by the National Research Foundation of Korea under NRF-2011-0011774.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)