Surface polishing of three dimensional micro structures

Engineering & Materials Science

• Polishing 95%
• Wet etching 60%
• Magnetorheological fluids 58%
• Microstructure 57%
• Electroplating 52%
• Macros 19%
• Surface roughness 17%
• Copper 17%
• Silicon 16%
• Fabrication 15%
• Geometry 13%

Physics & Astronomy

• polishing 90%
• magnetorheological fluids 61%
• electroplating 51%
• microstructure 50%
• etching 32%
• flat surfaces 19%
• surface roughness 18%
• copper 15%
• fabrication 13%
• geometry 12%
• silicon 11%
• performance 9%

Chemistry

• Polishing 100%
• Microstructure 58%
• Etching 38%
• Electrodeposition 36%
• Surface 27%
• Surface Roughness 21%