Surface scaling evolution and dielectric properties of sputter-deposited low loss Mg₂SiO₄ thin films

Engineering & Materials Science

• Dielectric properties 100%
• Thin films 77%
• Dielectric losses 34%
• Crystal microstructure 34%
• Power spectrum 29%
• Permittivity 27%
• Microscopes 26%
• Surface roughness 22%
• Substrates 19%
• Temperature 11%

Physics & Astronomy

• dielectric properties 68%
• scaling 57%
• thin films 42%
• tangents 27%
• dielectric loss 26%
• power spectra 25%
• surface roughness 23%
• microscopes 21%
• exponents 20%
• permittivity 19%
• temperature 8%

Chemistry

• Dielectric Property 82%
• Correlation Function 54%
• Dielectric Loss 47%
• Surface Roughness 41%
• Dielectric Constant 37%
• Force 27%
• Surface 26%
• Time 14%