Suspended Alumina Membrane for GA2O3 Gas Sensor with Enhanced Lifetime at High-Temperature

Han Il Jeong; Gyujun Choi; Jongbaeg Kim

doi:10.1109/MEMS46641.2020.9056354

Suspended Alumina Membrane for GA₂O₃ Gas Sensor with Enhanced Lifetime at High-Temperature

Han Il Jeong, Gyujun Choi, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We demonstrate micro hotplate (mu mathrm{HP}) to utilize gallium oxide with high stability and sensing performance at high temperatures as a sensing material. In order to enhance the lifetime and reduce the heat loss during high-temperature operation, a platinum electrode was embedded between two alumina thin films in a suspended bridge shape. The fabrication process involves no high-temperature process such as sintering, despite the use of ceramic materials, making it compatible with CMOS process. While the conventional silicon nitride-based mu mathrm{HP} damaged the platinum electrode within 5 seconds at 650°C, the alumina-based mu mathrm{HP} endured without failure for over 110 hours. The deposited gallium oxide thin film on the fabricated alumina mu mathrm{HP} successfully detected carbon monoxide and nitrogen dioxide at 650°C, showing that the developed sensor platform is suitable for high-temperature application such as exhaust gas detection.

Original language	English
Title of host publication	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	729-732
Number of pages	4
ISBN (Electronic)	9781728135809
DOIs	https://doi.org/10.1109/MEMS46641.2020.9056354
Publication status	Published - 2020 Jan
Event	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada Duration: 2020 Jan 18 → 2020 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2020-January
ISSN (Print)	1084-6999

Conference

Conference	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/Territory	Canada
City	Vancouver
Period	20/1/18 → 20/1/22

Bibliographical note

Funding Information:
This material is based upon work supported by the Ministry of Trade, Industry & Energy(MOTIE, Korea) under Industrial Technology Innovation Program (No.10070075, 'Development of bi-functional smart sensor for detection & filtering of hazardous gases') and the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIT) (No. NRF-2018R1A2A1A05023070).

Publisher Copyright:
© 2020 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS46641.2020.9056354

Cite this

Jeong, H. I., Choi, G., & Kim, J. (2020). Suspended Alumina Membrane for GA₂O₃ Gas Sensor with Enhanced Lifetime at High-Temperature. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 729-732). [9056354] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS46641.2020.9056354

Jeong, Han Il ; Choi, Gyujun ; Kim, Jongbaeg. / Suspended Alumina Membrane for GA₂O₃ Gas Sensor with Enhanced Lifetime at High-Temperature. 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 729-732 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We demonstrate micro hotplate (mu mathrm{HP}) to utilize gallium oxide with high stability and sensing performance at high temperatures as a sensing material. In order to enhance the lifetime and reduce the heat loss during high-temperature operation, a platinum electrode was embedded between two alumina thin films in a suspended bridge shape. The fabrication process involves no high-temperature process such as sintering, despite the use of ceramic materials, making it compatible with CMOS process. While the conventional silicon nitride-based mu mathrm{HP} damaged the platinum electrode within 5 seconds at 650°C, the alumina-based mu mathrm{HP} endured without failure for over 110 hours. The deposited gallium oxide thin film on the fabricated alumina mu mathrm{HP} successfully detected carbon monoxide and nitrogen dioxide at 650°C, showing that the developed sensor platform is suitable for high-temperature application such as exhaust gas detection.",

author = "Jeong, {Han Il} and Gyujun Choi and Jongbaeg Kim",

note = "Funding Information: This material is based upon work supported by the Ministry of Trade, Industry & Energy(MOTIE, Korea) under Industrial Technology Innovation Program (No.10070075, 'Development of bi-functional smart sensor for detection & filtering of hazardous gases') and the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIT) (No. NRF-2018R1A2A1A05023070). Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",

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Jeong, HI, Choi, G & Kim, J 2020, Suspended Alumina Membrane for GA₂O₃ Gas Sensor with Enhanced Lifetime at High-Temperature. in 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020., 9056354, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2020-January, Institute of Electrical and Electronics Engineers Inc., pp. 729-732, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020, Vancouver, Canada, 20/1/18. https://doi.org/10.1109/MEMS46641.2020.9056354

Suspended Alumina Membrane for GA₂O₃ Gas Sensor with Enhanced Lifetime at High-Temperature. / Jeong, Han Il; Choi, Gyujun; Kim, Jongbaeg.

33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 729-732 9056354 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N1 - Funding Information: This material is based upon work supported by the Ministry of Trade, Industry & Energy(MOTIE, Korea) under Industrial Technology Innovation Program (No.10070075, 'Development of bi-functional smart sensor for detection & filtering of hazardous gases') and the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIT) (No. NRF-2018R1A2A1A05023070). Publisher Copyright: © 2020 IEEE.

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N2 - We demonstrate micro hotplate (mu mathrm{HP}) to utilize gallium oxide with high stability and sensing performance at high temperatures as a sensing material. In order to enhance the lifetime and reduce the heat loss during high-temperature operation, a platinum electrode was embedded between two alumina thin films in a suspended bridge shape. The fabrication process involves no high-temperature process such as sintering, despite the use of ceramic materials, making it compatible with CMOS process. While the conventional silicon nitride-based mu mathrm{HP} damaged the platinum electrode within 5 seconds at 650°C, the alumina-based mu mathrm{HP} endured without failure for over 110 hours. The deposited gallium oxide thin film on the fabricated alumina mu mathrm{HP} successfully detected carbon monoxide and nitrogen dioxide at 650°C, showing that the developed sensor platform is suitable for high-temperature application such as exhaust gas detection.

AB - We demonstrate micro hotplate (mu mathrm{HP}) to utilize gallium oxide with high stability and sensing performance at high temperatures as a sensing material. In order to enhance the lifetime and reduce the heat loss during high-temperature operation, a platinum electrode was embedded between two alumina thin films in a suspended bridge shape. The fabrication process involves no high-temperature process such as sintering, despite the use of ceramic materials, making it compatible with CMOS process. While the conventional silicon nitride-based mu mathrm{HP} damaged the platinum electrode within 5 seconds at 650°C, the alumina-based mu mathrm{HP} endured without failure for over 110 hours. The deposited gallium oxide thin film on the fabricated alumina mu mathrm{HP} successfully detected carbon monoxide and nitrogen dioxide at 650°C, showing that the developed sensor platform is suitable for high-temperature application such as exhaust gas detection.

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Jeong HI, Choi G, Kim J. Suspended Alumina Membrane for GA₂O₃ Gas Sensor with Enhanced Lifetime at High-Temperature. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 729-732. 9056354. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS46641.2020.9056354