We propose a gas sensor operable over a wide temperature range and using suspended GaN nanowires functionalized with Pt-Pd. The sensor is batch-fabricated by directly integrating the GaN nanowires onto batch-processed silicon microelectrodes in parallel. The high thermal stability of the sensor originates from a large band gap of GaN nanowires that enables the detection of NO2 gas at an elevated temperature of up to 350 C without a decrease in responsiveness. Exposed to NO2 at 100- 1000 ppm at 350 C, the sensor shows a linear increment in relative response with respect to the change in gas concentration. The sensor results in a two- to four-fold increase in responsiveness to NO2 at 100 ppm compared to NH3 at 100 ppm and CO2 at 1000 ppm. The nanowires suspended over a substrate provide increased surface area that could interact with gas molecules for enhanced responsiveness, and prevent any unnecessary interactions between the nanowires and the substrate.
All Science Journal Classification (ASJC) codes
- Analytical Chemistry
- Environmental Chemistry