Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor

Jungwook Choi, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The nanowire sensing structure is formed by Focused Ion Beam-Chemical Vapor Deposition on the batch-fabricated microelectrodes. The tungsten nanowire measures 10μm in length and 150nm in diameter, and is suspended 50μm above the wafer substrate connecting two microelectrodes. The nanowire is then functionalized by Pd-Pt metallization to be sensitive to hydrogen gas. The experimentally characterized hydrogen sensor shows 11.52% of resistance increase to the exposure to 10000ppm (1%) hydrogen gas and 99% nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration we measured is 10ppm with 0.58% corresponding resistance increase.

Original languageEnglish
Title of host publication3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Pages927-931
Number of pages5
DOIs
Publication statusPublished - 2008
Event3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
Duration: 2008 Jan 62008 Jan 9

Publication series

Name3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
CountryChina
CitySanya
Period08/1/608/1/9

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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