Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor

Jungwook Choi, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The nanowire sensing structure is formed by Focused Ion Beam-Chemical Vapor Deposition on the batch-fabricated microelectrodes. The tungsten nanowire measures 10μm in length and 150nm in diameter, and is suspended 50μm above the wafer substrate connecting two microelectrodes. The nanowire is then functionalized by Pd-Pt metallization to be sensitive to hydrogen gas. The experimentally characterized hydrogen sensor shows 11.52% of resistance increase to the exposure to 10000ppm (1%) hydrogen gas and 99% nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration we measured is 10ppm with 0.58% corresponding resistance increase.

Original languageEnglish
Title of host publication3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Pages927-931
Number of pages5
DOIs
Publication statusPublished - 2008 Sep 1
Event3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
Duration: 2008 Jan 62008 Jan 9

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
CountryChina
CitySanya
Period08/1/608/1/9

Fingerprint

Focused ion beams
Nanowires
Hydrogen
Sensors
Microelectrodes
Tungsten
Metallizing
Gases
Gas mixtures
Atmospheric pressure
Chemical vapor deposition
Nitrogen
Substrates
Temperature

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Choi, J., & Kim, J. (2008). Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor. In 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 (pp. 927-931). [4484474] https://doi.org/10.1109/NEMS.2008.4484474
Choi, Jungwook ; Kim, Jongbaeg. / Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor. 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. 2008. pp. 927-931
@inproceedings{c06130712b5f47deb28871031a02f59f,
title = "Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor",
abstract = "A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The nanowire sensing structure is formed by Focused Ion Beam-Chemical Vapor Deposition on the batch-fabricated microelectrodes. The tungsten nanowire measures 10μm in length and 150nm in diameter, and is suspended 50μm above the wafer substrate connecting two microelectrodes. The nanowire is then functionalized by Pd-Pt metallization to be sensitive to hydrogen gas. The experimentally characterized hydrogen sensor shows 11.52{\%} of resistance increase to the exposure to 10000ppm (1{\%}) hydrogen gas and 99{\%} nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration we measured is 10ppm with 0.58{\%} corresponding resistance increase.",
author = "Jungwook Choi and Jongbaeg Kim",
year = "2008",
month = "9",
day = "1",
doi = "10.1109/NEMS.2008.4484474",
language = "English",
isbn = "9781424419081",
pages = "927--931",
booktitle = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008",

}

Choi, J & Kim, J 2008, Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor. in 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008., 4484474, pp. 927-931, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China, 08/1/6. https://doi.org/10.1109/NEMS.2008.4484474

Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor. / Choi, Jungwook; Kim, Jongbaeg.

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. 2008. p. 927-931 4484474.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor

AU - Choi, Jungwook

AU - Kim, Jongbaeg

PY - 2008/9/1

Y1 - 2008/9/1

N2 - A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The nanowire sensing structure is formed by Focused Ion Beam-Chemical Vapor Deposition on the batch-fabricated microelectrodes. The tungsten nanowire measures 10μm in length and 150nm in diameter, and is suspended 50μm above the wafer substrate connecting two microelectrodes. The nanowire is then functionalized by Pd-Pt metallization to be sensitive to hydrogen gas. The experimentally characterized hydrogen sensor shows 11.52% of resistance increase to the exposure to 10000ppm (1%) hydrogen gas and 99% nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration we measured is 10ppm with 0.58% corresponding resistance increase.

AB - A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The nanowire sensing structure is formed by Focused Ion Beam-Chemical Vapor Deposition on the batch-fabricated microelectrodes. The tungsten nanowire measures 10μm in length and 150nm in diameter, and is suspended 50μm above the wafer substrate connecting two microelectrodes. The nanowire is then functionalized by Pd-Pt metallization to be sensitive to hydrogen gas. The experimentally characterized hydrogen sensor shows 11.52% of resistance increase to the exposure to 10000ppm (1%) hydrogen gas and 99% nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration we measured is 10ppm with 0.58% corresponding resistance increase.

UR - http://www.scopus.com/inward/record.url?scp=50249154354&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50249154354&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2008.4484474

DO - 10.1109/NEMS.2008.4484474

M3 - Conference contribution

SN - 9781424419081

SP - 927

EP - 931

BT - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008

ER -

Choi J, Kim J. Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor. In 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. 2008. p. 927-931. 4484474 https://doi.org/10.1109/NEMS.2008.4484474