Sustainable fabrication of glass nanostructures using infrared transparent mold assisted by CO2 laser scanning irradiation

Mohd Zairulnizam Bin Mohd Zawawi, Taekyung Kim, Myungki Jung, Jaehun Im, Shinill Kang

Research output: Contribution to journalArticle

Abstract

Direct thermal imprinting of nanostructures on glass substrates is reliable when manufacturing net-shaped glass devices with various surface functions. However, several problems are recognized, including a long thermal cycle, tedious optimization, difficulties in ensuring high level replication fidelity, and unnecessary thermal deformation of the glass substrate. Here, we describe a more sustainable and energy efficient method for direct thermal imprinting of nanostructures onto glass substrates; we use silicon mold transparent to infrared between 2.5 and 25 lm in wavelength combined with CO2 laser scanning irradiation. The glass strongly absorbed the 10.6 lm wavelength irradiation, triggering substantial heating of a thin layer on the glass surface, which significantly enhanced the filling of pressed glass material into nanostructured silicon mold cavities. For comparison, we conducted conventional direct glass thermal imprinting experiments, further emphasizing the advantages of our new method, which outperformed conventional methods. The thermal mass cycle was shorter and the imprint pattern quality and yield, higher. Our method is sustainable, allowing more rapid scalable fabrication of glass nanostructures using less energy without sacrificing the quality and productivity of the fabricated devices,

Original languageEnglish
Article number121005
JournalJournal of Manufacturing Science and Engineering, Transactions of the ASME
Volume140
Issue number12
DOIs
Publication statusPublished - 2018 Dec 1

Fingerprint

Nanostructures
Irradiation
Infrared radiation
Scanning
Fabrication
Glass
Lasers
Substrates
Silicon
Wavelength
Nanostructured materials
Hot Temperature
Productivity
Heating

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

Cite this

@article{545b2eeead0c405facf0a9546462eac2,
title = "Sustainable fabrication of glass nanostructures using infrared transparent mold assisted by CO2 laser scanning irradiation",
abstract = "Direct thermal imprinting of nanostructures on glass substrates is reliable when manufacturing net-shaped glass devices with various surface functions. However, several problems are recognized, including a long thermal cycle, tedious optimization, difficulties in ensuring high level replication fidelity, and unnecessary thermal deformation of the glass substrate. Here, we describe a more sustainable and energy efficient method for direct thermal imprinting of nanostructures onto glass substrates; we use silicon mold transparent to infrared between 2.5 and 25 lm in wavelength combined with CO2 laser scanning irradiation. The glass strongly absorbed the 10.6 lm wavelength irradiation, triggering substantial heating of a thin layer on the glass surface, which significantly enhanced the filling of pressed glass material into nanostructured silicon mold cavities. For comparison, we conducted conventional direct glass thermal imprinting experiments, further emphasizing the advantages of our new method, which outperformed conventional methods. The thermal mass cycle was shorter and the imprint pattern quality and yield, higher. Our method is sustainable, allowing more rapid scalable fabrication of glass nanostructures using less energy without sacrificing the quality and productivity of the fabricated devices,",
author = "Zawawi, {Mohd Zairulnizam Bin Mohd} and Taekyung Kim and Myungki Jung and Jaehun Im and Shinill Kang",
year = "2018",
month = "12",
day = "1",
doi = "10.1115/1.4041181",
language = "English",
volume = "140",
journal = "Journal of Manufacturing Science and Engineering, Transactions of the ASME",
issn = "1087-1357",
publisher = "American Society of Mechanical Engineers(ASME)",
number = "12",

}

Sustainable fabrication of glass nanostructures using infrared transparent mold assisted by CO2 laser scanning irradiation. / Zawawi, Mohd Zairulnizam Bin Mohd; Kim, Taekyung; Jung, Myungki; Im, Jaehun; Kang, Shinill.

In: Journal of Manufacturing Science and Engineering, Transactions of the ASME, Vol. 140, No. 12, 121005, 01.12.2018.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Sustainable fabrication of glass nanostructures using infrared transparent mold assisted by CO2 laser scanning irradiation

AU - Zawawi, Mohd Zairulnizam Bin Mohd

AU - Kim, Taekyung

AU - Jung, Myungki

AU - Im, Jaehun

AU - Kang, Shinill

PY - 2018/12/1

Y1 - 2018/12/1

N2 - Direct thermal imprinting of nanostructures on glass substrates is reliable when manufacturing net-shaped glass devices with various surface functions. However, several problems are recognized, including a long thermal cycle, tedious optimization, difficulties in ensuring high level replication fidelity, and unnecessary thermal deformation of the glass substrate. Here, we describe a more sustainable and energy efficient method for direct thermal imprinting of nanostructures onto glass substrates; we use silicon mold transparent to infrared between 2.5 and 25 lm in wavelength combined with CO2 laser scanning irradiation. The glass strongly absorbed the 10.6 lm wavelength irradiation, triggering substantial heating of a thin layer on the glass surface, which significantly enhanced the filling of pressed glass material into nanostructured silicon mold cavities. For comparison, we conducted conventional direct glass thermal imprinting experiments, further emphasizing the advantages of our new method, which outperformed conventional methods. The thermal mass cycle was shorter and the imprint pattern quality and yield, higher. Our method is sustainable, allowing more rapid scalable fabrication of glass nanostructures using less energy without sacrificing the quality and productivity of the fabricated devices,

AB - Direct thermal imprinting of nanostructures on glass substrates is reliable when manufacturing net-shaped glass devices with various surface functions. However, several problems are recognized, including a long thermal cycle, tedious optimization, difficulties in ensuring high level replication fidelity, and unnecessary thermal deformation of the glass substrate. Here, we describe a more sustainable and energy efficient method for direct thermal imprinting of nanostructures onto glass substrates; we use silicon mold transparent to infrared between 2.5 and 25 lm in wavelength combined with CO2 laser scanning irradiation. The glass strongly absorbed the 10.6 lm wavelength irradiation, triggering substantial heating of a thin layer on the glass surface, which significantly enhanced the filling of pressed glass material into nanostructured silicon mold cavities. For comparison, we conducted conventional direct glass thermal imprinting experiments, further emphasizing the advantages of our new method, which outperformed conventional methods. The thermal mass cycle was shorter and the imprint pattern quality and yield, higher. Our method is sustainable, allowing more rapid scalable fabrication of glass nanostructures using less energy without sacrificing the quality and productivity of the fabricated devices,

UR - http://www.scopus.com/inward/record.url?scp=85060401591&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85060401591&partnerID=8YFLogxK

U2 - 10.1115/1.4041181

DO - 10.1115/1.4041181

M3 - Article

AN - SCOPUS:85060401591

VL - 140

JO - Journal of Manufacturing Science and Engineering, Transactions of the ASME

JF - Journal of Manufacturing Science and Engineering, Transactions of the ASME

SN - 1087-1357

IS - 12

M1 - 121005

ER -