Switching time reduction for electrostatic torsional micromirrors using input shaping

Youngkee Eun, Bongwon Jeong, Jongbaeg Kim

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We have demonstrated switching time reduction for microfabricated, vertical comb-based electrostatic torsional micromirror actuators by suppressing residual vibration using pre-shaped command inputs. The step input is pre-shaped by pulse-impulse convolution method, one of the impulse shaping filters. The micromirror actuators tested in experiment are made of single-crystal silicon and driven by vertical comb sets in torsional direction. Before shaping the input signal, the measured 2% settling time is 25 ms with percent overshoot of 58% for a step voltage input to induce the angular motion in micromirror actuator. The improved settling time is observed to be 8ms with 5.8% overshoot when the pre-shaped input is applied. The input-shaping technique is applied to two types of microactuators with different dynamic characteristics in order to verify its feasibility on various systems, and it is experimentally shown that the pre-shaped input command successfully suppresses the residual vibration for both highly underdamped microactuators.

Original languageEnglish
Pages (from-to)541021-541025
Number of pages5
JournalJapanese Journal of Applied Physics
Volume49
Issue number5 PART 1
DOIs
Publication statusPublished - 2010 May 1

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Microactuators
Electrostatics
Actuators
electrostatics
Convolution
actuators
settling
commands
impulses
Single crystals
Silicon
Electric potential
vibration
angular velocity
convolution integrals
dynamic characteristics
Experiments
filters
single crystals
electric potential

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

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Switching time reduction for electrostatic torsional micromirrors using input shaping. / Eun, Youngkee; Jeong, Bongwon; Kim, Jongbaeg.

In: Japanese Journal of Applied Physics, Vol. 49, No. 5 PART 1, 01.05.2010, p. 541021-541025.

Research output: Contribution to journalArticle

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AU - Jeong, Bongwon

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