Synthesis and bidirectional frequency tuning of cantilever-shape nano resonators using a focused ion beam

Jiyoung Chang, Kisik Koh, Byung Kwon Min, Sang Jo Lee, Jongbaeg Kim, Liwei Lin

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3 Citations (Scopus)

Abstract

The synthesis of cantilever-shape nano resonators and their resonant frequency tunings in both upward and downward directions have been demonstrated using FIB-CVD (focused ion beam-chemical vapor deposition). The in situ experimental observations of mechanical resonances as well as cutting and adding of resonator materials have been accomplished inside the FIB vacuum chamber. Extending the length of the cantilever-shape resonator by 500 nm scale using either the same material or alternating different materials effectively reduced resonant frequency. On the other hand, direct cutting and gradual trimming of the end point of nano resonator increases its resonant frequency. This simple yet versatile synthesis and frequency tuning scheme could be applicable to both constructing micro/nano scale resonators and tuning nanostructures with reduced efforts and enhanced efficiency.

Original languageEnglish
Pages (from-to)9684-9690
Number of pages7
JournalACS Applied Materials and Interfaces
Volume5
Issue number19
DOIs
Publication statusPublished - 2013 Oct 18

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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