We report the epitaxial growth of strontium barium niobate (SrxBa1-xNb2O6), potassium niobate (KNbO3), and lithium niobate (LiNbO3) thin films by pulsed laser deposition. From the characteristics of the deposition rate vs. laser fluence, threshold energy for ablation is around 1.5 J/cm2. For the oxygen pressure higher than 10-2 Torr, the deposition rate decreases exponentially with pressure due to the scattering with background gas. Epitaxial films are grown at 725°C for SBN, 675°C for KNbO3, and 450°C for LiNbO3, respectively. The ion channeling in Rutherford backscattering spectroscopy indicates the crystalline perfection of the epitaxial layers in SBN film. SBN has two sets of in-plane orientations while KNbO3, and LiNbO3 grow in single crystalline form as verified from x-ray φ scan. All films show optical waveguiding in prism coupling measurements.
|Journal||Journal of the Korean Physical Society|
|Issue number||4 SUPPL.|
|Publication status||Published - 1998 Dec 1|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)