Synthesis and properties of ferroelectric niobate thin films prepared by pulsed laser deposition for optical waveguide application

Jong Souk Yeo, Lambertus Hesselink

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We report the epitaxial growth of strontium barium niobate (SrxBa1-xNb2O6), potassium niobate (KNbO3), and lithium niobate (LiNbO3) thin films by pulsed laser deposition. From the characteristics of the deposition rate vs. laser fluence, threshold energy for ablation is around 1.5 J/cm2. For the oxygen pressure higher than 10-2 Torr, the deposition rate decreases exponentially with pressure due to the scattering with background gas. Epitaxial films are grown at 725°C for SBN, 675°C for KNbO3, and 450°C for LiNbO3, respectively. The ion channeling in Rutherford backscattering spectroscopy indicates the crystalline perfection of the epitaxial layers in SBN film. SBN has two sets of in-plane orientations while KNbO3, and LiNbO3 grow in single crystalline form as verified from x-ray φ scan. All films show optical waveguiding in prism coupling measurements.

Original languageEnglish
JournalJournal of the Korean Physical Society
Volume32
Issue number4 SUPPL.
Publication statusPublished - 1998 Dec 1

Fingerprint

niobates
optical waveguides
pulsed laser deposition
synthesis
thin films
high pressure oxygen
lithium niobates
strontium
ablation
prisms
barium
potassium
backscattering
fluence
thresholds
scattering
gases
spectroscopy
lasers
ions

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

@article{6e0651e4f3b949c5addea504e139e20c,
title = "Synthesis and properties of ferroelectric niobate thin films prepared by pulsed laser deposition for optical waveguide application",
abstract = "We report the epitaxial growth of strontium barium niobate (SrxBa1-xNb2O6), potassium niobate (KNbO3), and lithium niobate (LiNbO3) thin films by pulsed laser deposition. From the characteristics of the deposition rate vs. laser fluence, threshold energy for ablation is around 1.5 J/cm2. For the oxygen pressure higher than 10-2 Torr, the deposition rate decreases exponentially with pressure due to the scattering with background gas. Epitaxial films are grown at 725°C for SBN, 675°C for KNbO3, and 450°C for LiNbO3, respectively. The ion channeling in Rutherford backscattering spectroscopy indicates the crystalline perfection of the epitaxial layers in SBN film. SBN has two sets of in-plane orientations while KNbO3, and LiNbO3 grow in single crystalline form as verified from x-ray φ scan. All films show optical waveguiding in prism coupling measurements.",
author = "Yeo, {Jong Souk} and Lambertus Hesselink",
year = "1998",
month = "12",
day = "1",
language = "English",
volume = "32",
journal = "Journal of the Korean Physical Society",
issn = "0374-4884",
publisher = "Korean Physical Society",
number = "4 SUPPL.",

}

TY - JOUR

T1 - Synthesis and properties of ferroelectric niobate thin films prepared by pulsed laser deposition for optical waveguide application

AU - Yeo, Jong Souk

AU - Hesselink, Lambertus

PY - 1998/12/1

Y1 - 1998/12/1

N2 - We report the epitaxial growth of strontium barium niobate (SrxBa1-xNb2O6), potassium niobate (KNbO3), and lithium niobate (LiNbO3) thin films by pulsed laser deposition. From the characteristics of the deposition rate vs. laser fluence, threshold energy for ablation is around 1.5 J/cm2. For the oxygen pressure higher than 10-2 Torr, the deposition rate decreases exponentially with pressure due to the scattering with background gas. Epitaxial films are grown at 725°C for SBN, 675°C for KNbO3, and 450°C for LiNbO3, respectively. The ion channeling in Rutherford backscattering spectroscopy indicates the crystalline perfection of the epitaxial layers in SBN film. SBN has two sets of in-plane orientations while KNbO3, and LiNbO3 grow in single crystalline form as verified from x-ray φ scan. All films show optical waveguiding in prism coupling measurements.

AB - We report the epitaxial growth of strontium barium niobate (SrxBa1-xNb2O6), potassium niobate (KNbO3), and lithium niobate (LiNbO3) thin films by pulsed laser deposition. From the characteristics of the deposition rate vs. laser fluence, threshold energy for ablation is around 1.5 J/cm2. For the oxygen pressure higher than 10-2 Torr, the deposition rate decreases exponentially with pressure due to the scattering with background gas. Epitaxial films are grown at 725°C for SBN, 675°C for KNbO3, and 450°C for LiNbO3, respectively. The ion channeling in Rutherford backscattering spectroscopy indicates the crystalline perfection of the epitaxial layers in SBN film. SBN has two sets of in-plane orientations while KNbO3, and LiNbO3 grow in single crystalline form as verified from x-ray φ scan. All films show optical waveguiding in prism coupling measurements.

UR - http://www.scopus.com/inward/record.url?scp=0032360504&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032360504&partnerID=8YFLogxK

M3 - Article

VL - 32

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

SN - 0374-4884

IS - 4 SUPPL.

ER -