Synthesis of Si nanowires by using atmospheric pressure chemical vapor deposition with SiCl4

Taejin Choi, Hyungjun Kim, Doyoung Kim, Taehoon Cheon, Soohyun Kim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Silicon nanowires were synthesized by using a vapor-liquid-solid method and atmospheric pressure chemical vapor deposition with silicon tetrachloride as the Si source. A thin Au film (1-nm thick) deposited on a Si substrate was used as a catalyst, and Au nanodots were formed subsequently by using a high-temperature chemical vapor deposition process. Small-diameter Si nanowires (~15 nm) with a thin amorphous oxide sheath (2 ~ 3 nm) were densely grown under the condition of abundant H2 gas and proper N2 carrier gas flow into the hot-wall chamber. The high crystallinity of the Si nanowires was verified by using high-resolution transmission electron microscopy, selected area electron diffraction, and Raman spectroscopy.

Original languageEnglish
Pages (from-to)485-488
Number of pages4
JournalJournal of the Korean Physical Society
Volume59
Issue number21
DOIs
Publication statusPublished - 2011 Aug 12

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atmospheric pressure
nanowires
vapor deposition
synthesis
silicon tetrachloride
sheaths
gas flow
crystallinity
electron diffraction
Raman spectroscopy
chambers
vapors
catalysts
transmission electron microscopy
oxides
high resolution
silicon
liquids
thin films
gases

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Choi, Taejin ; Kim, Hyungjun ; Kim, Doyoung ; Cheon, Taehoon ; Kim, Soohyun. / Synthesis of Si nanowires by using atmospheric pressure chemical vapor deposition with SiCl4 In: Journal of the Korean Physical Society. 2011 ; Vol. 59, No. 21. pp. 485-488.
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Synthesis of Si nanowires by using atmospheric pressure chemical vapor deposition with SiCl4 . / Choi, Taejin; Kim, Hyungjun; Kim, Doyoung; Cheon, Taehoon; Kim, Soohyun.

In: Journal of the Korean Physical Society, Vol. 59, No. 21, 12.08.2011, p. 485-488.

Research output: Contribution to journalArticle

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