Abstract
The properties of tin oxide films deposited at room temperature by dual ion beam sputtering (DIBS) using Sn targets and oxygen ion-beam have been examined as a function of oxygen ion energy. Studies by X-ray diffraction (XRD) showed that, with increasing oxygen ion-beam energy, the amorphous microstructure transformed into a crystalline SnO2 phase and the preferred orientations varied from (211), (101) to (002) on Si(100). Together with X-ray photoelectron spectroscopy (XPS), the Rutherford back-scattering (RBS) analyses revealed that, with an increase of oxygen ion-beam energy, the oxygen content and the packing density of the films increased slightly up to a value close to the stoichiometry of SnO2. These results indicate that crystalline SnO2 films can be synthesized at room temperature using DIBS with Sn target and oxygen ion-beam and also that the energetic oxygen ion-beams affect the phase formation, crystalline structure and the preferred orientation of the films.
| Original language | English |
|---|---|
| Pages (from-to) | 267-270 |
| Number of pages | 4 |
| Journal | Surface and Coatings Technology |
| Volume | 112 |
| Issue number | 1-3 |
| DOIs | |
| Publication status | Published - 1999 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
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Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam. / Choe, Yong Sahm; Chung, Jae Ho; Kim, Dae Seung; Baik, Hong Koo.
In: Surface and Coatings Technology, Vol. 112, No. 1-3, 01.01.1999, p. 267-270.Research output: Contribution to journal › Article
TY - JOUR
T1 - Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam
AU - Choe, Yong Sahm
AU - Chung, Jae Ho
AU - Kim, Dae Seung
AU - Baik, Hong Koo
PY - 1999/1/1
Y1 - 1999/1/1
N2 - The properties of tin oxide films deposited at room temperature by dual ion beam sputtering (DIBS) using Sn targets and oxygen ion-beam have been examined as a function of oxygen ion energy. Studies by X-ray diffraction (XRD) showed that, with increasing oxygen ion-beam energy, the amorphous microstructure transformed into a crystalline SnO2 phase and the preferred orientations varied from (211), (101) to (002) on Si(100). Together with X-ray photoelectron spectroscopy (XPS), the Rutherford back-scattering (RBS) analyses revealed that, with an increase of oxygen ion-beam energy, the oxygen content and the packing density of the films increased slightly up to a value close to the stoichiometry of SnO2. These results indicate that crystalline SnO2 films can be synthesized at room temperature using DIBS with Sn target and oxygen ion-beam and also that the energetic oxygen ion-beams affect the phase formation, crystalline structure and the preferred orientation of the films.
AB - The properties of tin oxide films deposited at room temperature by dual ion beam sputtering (DIBS) using Sn targets and oxygen ion-beam have been examined as a function of oxygen ion energy. Studies by X-ray diffraction (XRD) showed that, with increasing oxygen ion-beam energy, the amorphous microstructure transformed into a crystalline SnO2 phase and the preferred orientations varied from (211), (101) to (002) on Si(100). Together with X-ray photoelectron spectroscopy (XPS), the Rutherford back-scattering (RBS) analyses revealed that, with an increase of oxygen ion-beam energy, the oxygen content and the packing density of the films increased slightly up to a value close to the stoichiometry of SnO2. These results indicate that crystalline SnO2 films can be synthesized at room temperature using DIBS with Sn target and oxygen ion-beam and also that the energetic oxygen ion-beams affect the phase formation, crystalline structure and the preferred orientation of the films.
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UR - http://www.scopus.com/inward/citedby.url?scp=0033075834&partnerID=8YFLogxK
U2 - 10.1016/S0257-8972(98)00759-2
DO - 10.1016/S0257-8972(98)00759-2
M3 - Article
AN - SCOPUS:0033075834
VL - 112
SP - 267
EP - 270
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 1-3
ER -