A micro-fabricated bridge sensor for determining minute magnetic field variation is proposed. A micro-bridge with 100 × 400 μm2 dimensions (width × length) comprises a multi-layered structure of Tb 0:3Dy0:7Fe1:9/SiO2/Pt/PbZr 0:52Ti0:48O3/Pt/Ta on a SiNx supporting layer. We observed the limit of detection under small DC magnetic field as 1 × 10-11 T which was converted electrically to 77 μV with a 5 μV noise floor via elastic coupling between magnetostrictive and piezoelectric thin film. The magnetoelectric (ME) voltage was linearly proportional to small magnetic field variance, and the experimental ME coefficient was measured as 9.9 V/(cm·Oe).
|Journal||Japanese journal of applied physics|
|Issue number||10 PART2|
|Publication status||Published - 2013|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)