The effect of texture evolution on the magnetic properties of FeTaN films sputtered on sloping surfaces is examined as substrate bias and slope angle are varied. When either substrate bias increases or N2/Ar flow ratio decreases, the magnetic properties of the films become much softer. X-ray spectra and pole figures show that the increased substrate bias enhances both (110) fiber texture along the film normal and uniform distribution of  axes in the film plane. Increased bombardment of Ar ions also results in reduced (110) lattice spacing. An increased (110) peak intensity is similarly observed when the N2/Ar flow ratio is decreased.
Bibliographical noteFunding Information:
This work is partially supported by the NSF under grant No. ECS-9409805 and ECS-9710223, and has benefited from the facilities and equipment made available to Stanford University by the NSF-MRSEC program through the Center for Materials Research.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering