Texture and Magnetic Properties of FeTaN Films Bias-Sputtered on Sloping Surfaces

Jongill Hong, Shan X. Wang

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The effect of texture evolution on the magnetic properties of FeTaN films sputtered on sloping surfaces is examined as substrate bias and slope angle are varied. When either substrate bias increases or N2/Ar flow ratio decreases, the magnetic properties of the films become much softer. X-ray spectra and pole figures show that the increased substrate bias enhances both (110) fiber texture along the film normal and uniform distribution of [002] axes in the film plane. Increased bombardment of Ar ions also results in reduced (110) lattice spacing. An increased (110) peak intensity is similarly observed when the N2/Ar flow ratio is decreased.

Original languageEnglish
Pages (from-to)1444-1446
Number of pages3
JournalIEEE Transactions on Magnetics
Volume34
Issue number4 PART 1
DOIs
Publication statusPublished - 1998 Dec 1

Fingerprint

Magnetic properties
Textures
Substrates
Poles
Ions
X rays
Fibers

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

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Texture and Magnetic Properties of FeTaN Films Bias-Sputtered on Sloping Surfaces. / Hong, Jongill; Wang, Shan X.

In: IEEE Transactions on Magnetics, Vol. 34, No. 4 PART 1, 01.12.1998, p. 1444-1446.

Research output: Contribution to journalArticle

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