TFBAR filters for 2 GHz wireless applications

K. W. Kim, J. G. Yook, M. G. Gu, W. Y. Song, Y. J. Yoon

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Thin film bulk acoustic resonators (TFBAR) using AlN with two electrodes have been used in the design of band pass filters at 2 GHz frequency bands. Both membrane and air-gap are used to suppress the over-mode phenomenon. Resonator modeling was performed based on measured frequency response of a single resonator with modified Butterworth-Van Dyke (MBVD) model. Electric coupling coefficient, k, is 0.2075 (4.3%) and Q is 577.18 for a single TFBAR. Additional TFBAR is used to improve out of band rejection in the conventional ladder topology and each contributes -3 dB suppression improvement at stop-band. Four different types of ladder filters were fabricated and modelled and revealed only -2 to -3 dB insertion loss for all the cases with bandwidth of around 52 MHz.

Original languageEnglish
Pages (from-to)1181-1184
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Volume2
DOIs
Publication statusPublished - 2002 Jan 1

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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