TFBAR filters for 2 GHz wireless applications

K. W. Kim; J. G. Yook; M. G. Gu; W. Y. Song; Y. J. Yoon

doi:10.1109/MWSYM.2002.1011861

TFBAR filters for 2 GHz wireless applications

K. W. Kim, J. G. Yook, M. G. Gu, W. Y. Song, Y. J. Yoon

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Thin film bulk acoustic resonators (TFBAR) using AlN with two electrodes have been used in the design of band pass filters at 2 GHz frequency bands. Both membrane and air-gap are used to suppress the over-mode phenomenon. Resonator modeling was performed based on measured frequency response of a single resonator with modified Butterworth-Van Dyke (MBVD) model. Electric coupling coefficient, k, is 0.2075 (4.3%) and Q is 577.18 for a single TFBAR. Additional TFBAR is used to improve out of band rejection in the conventional ladder topology and each contributes -3 dB suppression improvement at stop-band. Four different types of ladder filters were fabricated and modelled and revealed only -2 to -3 dB insertion loss for all the cases with bandwidth of around 52 MHz.

Original language	English
Pages (from-to)	1181-1184
Number of pages	4
Journal	IEEE MTT-S International Microwave Symposium Digest
Volume	2
DOIs	https://doi.org/10.1109/MWSYM.2002.1011861
Publication status	Published - 2002

All Science Journal Classification (ASJC) codes

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/MWSYM.2002.1011861

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title = "TFBAR filters for 2 GHz wireless applications",

abstract = "Thin film bulk acoustic resonators (TFBAR) using AlN with two electrodes have been used in the design of band pass filters at 2 GHz frequency bands. Both membrane and air-gap are used to suppress the over-mode phenomenon. Resonator modeling was performed based on measured frequency response of a single resonator with modified Butterworth-Van Dyke (MBVD) model. Electric coupling coefficient, k, is 0.2075 (4.3%) and Q is 577.18 for a single TFBAR. Additional TFBAR is used to improve out of band rejection in the conventional ladder topology and each contributes -3 dB suppression improvement at stop-band. Four different types of ladder filters were fabricated and modelled and revealed only -2 to -3 dB insertion loss for all the cases with bandwidth of around 52 MHz.",

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T1 - TFBAR filters for 2 GHz wireless applications

AU - Kim, K. W.

AU - Yook, J. G.

AU - Gu, M. G.

AU - Song, W. Y.

AU - Yoon, Y. J.

PY - 2002

Y1 - 2002

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AB - Thin film bulk acoustic resonators (TFBAR) using AlN with two electrodes have been used in the design of band pass filters at 2 GHz frequency bands. Both membrane and air-gap are used to suppress the over-mode phenomenon. Resonator modeling was performed based on measured frequency response of a single resonator with modified Butterworth-Van Dyke (MBVD) model. Electric coupling coefficient, k, is 0.2075 (4.3%) and Q is 577.18 for a single TFBAR. Additional TFBAR is used to improve out of band rejection in the conventional ladder topology and each contributes -3 dB suppression improvement at stop-band. Four different types of ladder filters were fabricated and modelled and revealed only -2 to -3 dB insertion loss for all the cases with bandwidth of around 52 MHz.

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TFBAR filters for 2 GHz wireless applications

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