The annealing effect on damp heat stability of AGZO thin films prepared by DC moving magnetron sputtering

Jong Ho Kang, Myung Hyun Lee, Dae Wook Kim, Young Soo Lim, Won Seon Seo, Heon Jin Choi

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

In the research, we report the results on the damp heat stability test for the annealing effect of aluminum and gallium co-doped ZnO (AGZO) thin films. The prepared AGZO thin films (AGZO-RT) by DC moving magnetron sputtering at room temperature were exhibited thicknesses of 150 nm and the sheet resistances of 60-70/sq. And the part of the deposition, it was annealed in vacuum at 300 °C for 18 min. The damp heat tests of the two samples (AGZO-RT, AGZO-AN) were carried out in a chamber with 90% of relative humidity and 60 °C of temperature. As the time of the damp heat test increased, the electrical properties of AGZO-RT were more deteriorated than AGZO-AN. The sheet resistance by damp heat to the two samples increased more than three times after 1000 h. The various analytical methods were measured to the electrical, optical and structural properties in the damp heat condition tested about the two thin films, and the results will be discussed.

Original languageEnglish
Pages (from-to)S333-S336
JournalCurrent Applied Physics
Volume11
Issue number3 SUPPL.
DOIs
Publication statusPublished - 2011 May 1

Fingerprint

Gallium
Aluminum
Magnetron sputtering
gallium
magnetron sputtering
direct current
Annealing
aluminum
Thin films
heat
annealing
thin films
high temperature tests
Sheet resistance
Electric properties
electrical properties
stability tests
Hot Temperature
humidity
Structural properties

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

Kang, Jong Ho ; Lee, Myung Hyun ; Kim, Dae Wook ; Lim, Young Soo ; Seo, Won Seon ; Choi, Heon Jin. / The annealing effect on damp heat stability of AGZO thin films prepared by DC moving magnetron sputtering. In: Current Applied Physics. 2011 ; Vol. 11, No. 3 SUPPL. pp. S333-S336.
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The annealing effect on damp heat stability of AGZO thin films prepared by DC moving magnetron sputtering. / Kang, Jong Ho; Lee, Myung Hyun; Kim, Dae Wook; Lim, Young Soo; Seo, Won Seon; Choi, Heon Jin.

In: Current Applied Physics, Vol. 11, No. 3 SUPPL., 01.05.2011, p. S333-S336.

Research output: Contribution to journalArticle

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