The correlation between the laser energy density and the properties of diamond-like carbon films with Nd:YAG (355 nm) excimer laser

Hae Suk Jung, Hyung Ho Park, Seong Sik Pang, Sang Yeol Lee

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Diamond-like carbon (DLC) films were deposited using pulsed laser ablation of graphite target. The deposition process was performed with the change of laser energy density from 8 to 17 J/cm 2. Collected from analytical results, laser energy density is seen to play an important role in the formation of sp 3 carbon bondings in films. Also, the optimal deposition condition for DLC film was proposed and correlated with the laser energy density.

Original languageEnglish
Pages (from-to)S423-S426
JournalJournal of the Korean Physical Society
Volume33
Issue numberSUPPL. 2
Publication statusPublished - 1998

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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