The correlation between the laser energy density and the properties of diamond-like carbon films with Nd: YAG (355 nm) excimer laser

Hae Suk Jung, Hyung Ho Park, Seong Sik Pang, Sang Yeol Lee

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Diamond-like carbon (DLC) films were deposited using pulsed laser ablation of graphite target. The deposition process was performed with the change of laser energy density from 8 to 17 J/cm 2. Collected from analytical results, laser energy density is seen to play an important role in the formation of sp 3 carbon bondings in films. Also, the optimal deposition condition for DLC film was proposed and correlated with the laser energy density.

Original languageEnglish
JournalJournal of the Korean Physical Society
Volume33
Issue numberSUPPL. 2
Publication statusPublished - 1998 Dec 1

Fingerprint

excimer lasers
yttrium-aluminum garnet
flux density
diamonds
carbon
lasers
laser ablation
pulsed lasers
graphite

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

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abstract = "Diamond-like carbon (DLC) films were deposited using pulsed laser ablation of graphite target. The deposition process was performed with the change of laser energy density from 8 to 17 J/cm 2. Collected from analytical results, laser energy density is seen to play an important role in the formation of sp 3 carbon bondings in films. Also, the optimal deposition condition for DLC film was proposed and correlated with the laser energy density.",
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The correlation between the laser energy density and the properties of diamond-like carbon films with Nd : YAG (355 nm) excimer laser. / Jung, Hae Suk; Park, Hyung Ho; Pang, Seong Sik; Lee, Sang Yeol.

In: Journal of the Korean Physical Society, Vol. 33, No. SUPPL. 2, 01.12.1998.

Research output: Contribution to journalArticle

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AU - Jung, Hae Suk

AU - Park, Hyung Ho

AU - Pang, Seong Sik

AU - Lee, Sang Yeol

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