The crystallinity and mechanical properties of indium tin oxide coatings on polymer substrates

Eun Hye Kim, Chan Woo Yang, Jin Woo Park

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

We present the relationship between the microstructure and mechanical strength of indium tin oxide (ITO) on flexible substrates. With varying thickness (hf), ITO is deposited on polyethylene terephthalate (PET) by dc magnetron sputtering. The microstructure of ITO is controlled by substrate surface conditions and sputtering parameters. The maximum substrate temperature during deposition is limited to 80 °C due to the low glass transition temperature (Tg) of PET. The crystallinity and surface roughness (Rrms) are analyzed by high resolution x-ray diffraction, high resolution transmission electron microscopy, and AFM. The crack resistance of ITO is evaluated by uniaxial tension test. The experimental results reveal that, at a fixed hf, the degree and quality of crystallinity of ITO are highly improved by increasing sputtering power and the substrate temperature. As the crystallinity is improved, the ratio of preferred growth orientations of (222) to (400) is increased and the degree of peak shifts to lower 2 is decreased. They indicate that the crystallinity is improved as the lattice damage is reduced and film density is increased. The tension test results confirm that, up to a certain hf, the strength of ITO can be significantly enhanced by improving the microstructures.

Original languageEnglish
Article number043511
JournalJournal of Applied Physics
Volume109
Issue number4
DOIs
Publication statusPublished - 2011 Feb 15

Fingerprint

indium oxides
tin oxides
crystallinity
mechanical properties
coatings
polymers
polyethylene terephthalate
microstructure
sputtering
high resolution
glass transition temperature
magnetron sputtering
surface roughness
x ray diffraction
roughness
cracks
atomic force microscopy
damage
transmission electron microscopy
temperature

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

@article{e8b18a80cabe486f9936f64663645177,
title = "The crystallinity and mechanical properties of indium tin oxide coatings on polymer substrates",
abstract = "We present the relationship between the microstructure and mechanical strength of indium tin oxide (ITO) on flexible substrates. With varying thickness (hf), ITO is deposited on polyethylene terephthalate (PET) by dc magnetron sputtering. The microstructure of ITO is controlled by substrate surface conditions and sputtering parameters. The maximum substrate temperature during deposition is limited to 80 °C due to the low glass transition temperature (Tg) of PET. The crystallinity and surface roughness (Rrms) are analyzed by high resolution x-ray diffraction, high resolution transmission electron microscopy, and AFM. The crack resistance of ITO is evaluated by uniaxial tension test. The experimental results reveal that, at a fixed hf, the degree and quality of crystallinity of ITO are highly improved by increasing sputtering power and the substrate temperature. As the crystallinity is improved, the ratio of preferred growth orientations of (222) to (400) is increased and the degree of peak shifts to lower 2 is decreased. They indicate that the crystallinity is improved as the lattice damage is reduced and film density is increased. The tension test results confirm that, up to a certain hf, the strength of ITO can be significantly enhanced by improving the microstructures.",
author = "Kim, {Eun Hye} and Yang, {Chan Woo} and Park, {Jin Woo}",
year = "2011",
month = "2",
day = "15",
doi = "10.1063/1.3556452",
language = "English",
volume = "109",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "4",

}

The crystallinity and mechanical properties of indium tin oxide coatings on polymer substrates. / Kim, Eun Hye; Yang, Chan Woo; Park, Jin Woo.

In: Journal of Applied Physics, Vol. 109, No. 4, 043511, 15.02.2011.

Research output: Contribution to journalArticle

TY - JOUR

T1 - The crystallinity and mechanical properties of indium tin oxide coatings on polymer substrates

AU - Kim, Eun Hye

AU - Yang, Chan Woo

AU - Park, Jin Woo

PY - 2011/2/15

Y1 - 2011/2/15

N2 - We present the relationship between the microstructure and mechanical strength of indium tin oxide (ITO) on flexible substrates. With varying thickness (hf), ITO is deposited on polyethylene terephthalate (PET) by dc magnetron sputtering. The microstructure of ITO is controlled by substrate surface conditions and sputtering parameters. The maximum substrate temperature during deposition is limited to 80 °C due to the low glass transition temperature (Tg) of PET. The crystallinity and surface roughness (Rrms) are analyzed by high resolution x-ray diffraction, high resolution transmission electron microscopy, and AFM. The crack resistance of ITO is evaluated by uniaxial tension test. The experimental results reveal that, at a fixed hf, the degree and quality of crystallinity of ITO are highly improved by increasing sputtering power and the substrate temperature. As the crystallinity is improved, the ratio of preferred growth orientations of (222) to (400) is increased and the degree of peak shifts to lower 2 is decreased. They indicate that the crystallinity is improved as the lattice damage is reduced and film density is increased. The tension test results confirm that, up to a certain hf, the strength of ITO can be significantly enhanced by improving the microstructures.

AB - We present the relationship between the microstructure and mechanical strength of indium tin oxide (ITO) on flexible substrates. With varying thickness (hf), ITO is deposited on polyethylene terephthalate (PET) by dc magnetron sputtering. The microstructure of ITO is controlled by substrate surface conditions and sputtering parameters. The maximum substrate temperature during deposition is limited to 80 °C due to the low glass transition temperature (Tg) of PET. The crystallinity and surface roughness (Rrms) are analyzed by high resolution x-ray diffraction, high resolution transmission electron microscopy, and AFM. The crack resistance of ITO is evaluated by uniaxial tension test. The experimental results reveal that, at a fixed hf, the degree and quality of crystallinity of ITO are highly improved by increasing sputtering power and the substrate temperature. As the crystallinity is improved, the ratio of preferred growth orientations of (222) to (400) is increased and the degree of peak shifts to lower 2 is decreased. They indicate that the crystallinity is improved as the lattice damage is reduced and film density is increased. The tension test results confirm that, up to a certain hf, the strength of ITO can be significantly enhanced by improving the microstructures.

UR - http://www.scopus.com/inward/record.url?scp=79952126066&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79952126066&partnerID=8YFLogxK

U2 - 10.1063/1.3556452

DO - 10.1063/1.3556452

M3 - Article

AN - SCOPUS:79952126066

VL - 109

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 4

M1 - 043511

ER -