The effect of Ar+ ion bombardment on SiO2 aerogel film

Hong Ryul Kim, Hyung-Ho Park

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Ar+ ion bombardment on SiO2 aerogel films was introduced to investigate the physical collision effect of oxygen plasma treatment on the films. The changes of internal surface adsorbing species and microstructure in the films were analyzed through the treatments. Through chemically inert Ar+ ion bombarding treatment, internal surface organic groups were partially removed. A slight increase in surface particle size was observed, which results from the condensation of SiO2 particles due to the elimination of internal surface adsorbing organics. According to the increase in the accelerating voltage of Ar+ ion, the reduction of film thickness became larger than that observed with oxygen plasma treatment. The film thickness is maintained uniform with varying the treatment time and this confirms that there is no measurable etching happened within our treatment conditions. From these it is confirmed that a collapse of 3-dimensional network structure of SiO2 aerogel film was happened though Ar+ ion bombarding treatment.

Original languageEnglish
Pages (from-to)6955-6958
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume37
Issue number12 B
Publication statusPublished - 1998 Dec 1

Fingerprint

Aerogels
aerogels
Ion bombardment
bombardment
Film thickness
Ions
ions
Plasmas
oxygen plasma
Oxygen
film thickness
Condensation
Etching
Particle size
Microstructure
Electric potential
elimination
condensation
etching
microstructure

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

@article{4fdfcae526e14d0db97d164ab33f17bd,
title = "The effect of Ar+ ion bombardment on SiO2 aerogel film",
abstract = "Ar+ ion bombardment on SiO2 aerogel films was introduced to investigate the physical collision effect of oxygen plasma treatment on the films. The changes of internal surface adsorbing species and microstructure in the films were analyzed through the treatments. Through chemically inert Ar+ ion bombarding treatment, internal surface organic groups were partially removed. A slight increase in surface particle size was observed, which results from the condensation of SiO2 particles due to the elimination of internal surface adsorbing organics. According to the increase in the accelerating voltage of Ar+ ion, the reduction of film thickness became larger than that observed with oxygen plasma treatment. The film thickness is maintained uniform with varying the treatment time and this confirms that there is no measurable etching happened within our treatment conditions. From these it is confirmed that a collapse of 3-dimensional network structure of SiO2 aerogel film was happened though Ar+ ion bombarding treatment.",
author = "Kim, {Hong Ryul} and Hyung-Ho Park",
year = "1998",
month = "12",
day = "1",
language = "English",
volume = "37",
pages = "6955--6958",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "12 B",

}

The effect of Ar+ ion bombardment on SiO2 aerogel film. / Kim, Hong Ryul; Park, Hyung-Ho.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 37, No. 12 B, 01.12.1998, p. 6955-6958.

Research output: Contribution to journalArticle

TY - JOUR

T1 - The effect of Ar+ ion bombardment on SiO2 aerogel film

AU - Kim, Hong Ryul

AU - Park, Hyung-Ho

PY - 1998/12/1

Y1 - 1998/12/1

N2 - Ar+ ion bombardment on SiO2 aerogel films was introduced to investigate the physical collision effect of oxygen plasma treatment on the films. The changes of internal surface adsorbing species and microstructure in the films were analyzed through the treatments. Through chemically inert Ar+ ion bombarding treatment, internal surface organic groups were partially removed. A slight increase in surface particle size was observed, which results from the condensation of SiO2 particles due to the elimination of internal surface adsorbing organics. According to the increase in the accelerating voltage of Ar+ ion, the reduction of film thickness became larger than that observed with oxygen plasma treatment. The film thickness is maintained uniform with varying the treatment time and this confirms that there is no measurable etching happened within our treatment conditions. From these it is confirmed that a collapse of 3-dimensional network structure of SiO2 aerogel film was happened though Ar+ ion bombarding treatment.

AB - Ar+ ion bombardment on SiO2 aerogel films was introduced to investigate the physical collision effect of oxygen plasma treatment on the films. The changes of internal surface adsorbing species and microstructure in the films were analyzed through the treatments. Through chemically inert Ar+ ion bombarding treatment, internal surface organic groups were partially removed. A slight increase in surface particle size was observed, which results from the condensation of SiO2 particles due to the elimination of internal surface adsorbing organics. According to the increase in the accelerating voltage of Ar+ ion, the reduction of film thickness became larger than that observed with oxygen plasma treatment. The film thickness is maintained uniform with varying the treatment time and this confirms that there is no measurable etching happened within our treatment conditions. From these it is confirmed that a collapse of 3-dimensional network structure of SiO2 aerogel film was happened though Ar+ ion bombarding treatment.

UR - http://www.scopus.com/inward/record.url?scp=0001096192&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001096192&partnerID=8YFLogxK

M3 - Article

VL - 37

SP - 6955

EP - 6958

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 12 B

ER -