The effect of different substrate temperature on the electrical properties of Al-doped ZnO thin films

Bong Seok Kim; Eung Kwon Kim; Kyu Il Lee; Su Young Oh; Joon Tae Song

The effect of different substrate temperature on the electrical properties of Al-doped ZnO thin films

Bong Seok Kim, Eung Kwon Kim, Kyu Il Lee, Su Young Oh, Joon Tae Song

Department of Ophthalmology

Research output: Contribution to journal › Article › peer-review

Abstract

In this paper, the effect of substrate temperature on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) films were investigated. AZO thin films were prepared on glass substrate by pulsed DC magnetron sputtering technique. The properties of AZO were measured by using XRD, AFM, UV spectrophotometer, and hall effect measurement system. The resistivity of AZO films was improved under the condition of high substrate temperature. The resistivity decreased from 9.95×10^-2 Ω-cm to 1.1×10^-3-cm as a result of high substrate temperature and the average transmittances in visible range were above 80%.

Original language	English
Pages (from-to)	1782-1785
Number of pages	4
Journal	Transactions of the Korean Institute of Electrical Engineers
Volume	56
Issue number	10
Publication status	Published - 2007 Oct

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Cite this

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title = "The effect of different substrate temperature on the electrical properties of Al-doped ZnO thin films",

abstract = "In this paper, the effect of substrate temperature on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) films were investigated. AZO thin films were prepared on glass substrate by pulsed DC magnetron sputtering technique. The properties of AZO were measured by using XRD, AFM, UV spectrophotometer, and hall effect measurement system. The resistivity of AZO films was improved under the condition of high substrate temperature. The resistivity decreased from 9.95×10-2 Ω-cm to 1.1×10-3-cm as a result of high substrate temperature and the average transmittances in visible range were above 80%.",

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AU - Oh, Su Young

AU - Song, Joon Tae

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N2 - In this paper, the effect of substrate temperature on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) films were investigated. AZO thin films were prepared on glass substrate by pulsed DC magnetron sputtering technique. The properties of AZO were measured by using XRD, AFM, UV spectrophotometer, and hall effect measurement system. The resistivity of AZO films was improved under the condition of high substrate temperature. The resistivity decreased from 9.95×10-2 Ω-cm to 1.1×10-3-cm as a result of high substrate temperature and the average transmittances in visible range were above 80%.

AB - In this paper, the effect of substrate temperature on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) films were investigated. AZO thin films were prepared on glass substrate by pulsed DC magnetron sputtering technique. The properties of AZO were measured by using XRD, AFM, UV spectrophotometer, and hall effect measurement system. The resistivity of AZO films was improved under the condition of high substrate temperature. The resistivity decreased from 9.95×10-2 Ω-cm to 1.1×10-3-cm as a result of high substrate temperature and the average transmittances in visible range were above 80%.

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The effect of different substrate temperature on the electrical properties of Al-doped ZnO thin films

Abstract

All Science Journal Classification (ASJC) codes

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