The effect of NH3 on the interface of HfO2 and Al2 O3 films on GaAs(100) surfaces

Dong Chan Suh, Young Dae Cho, Yongshik Lee, Dae Hong Ko, Kwun Bum Chung, Mann Ho Cho

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


Dive into the research topics of 'The effect of NH<sub>3</sub> on the interface of HfO<sub>2</sub> and Al<sub>2</sub> O<sub>3</sub> films on GaAs(100) surfaces'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy