The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfO x Ny prepared by in situ nitridation

W. J. Maeng, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Fingerprint Dive into the research topics of 'The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfO <sub>x</sub> N<sub>y</sub> prepared by in situ nitridation'. Together they form a unique fingerprint.

Physics & Astronomy