The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfO x Ny prepared by in situ nitridation

W. J. Maeng, Hyungjun Kim

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Fingerprint

Dive into the research topics of 'The effects of nitrogen profile and concentration on negative bias temperature instability of plasma enhanced atomic layer deposition HfO x Ny prepared by in situ nitridation'. Together they form a unique fingerprint.

Physics

Chemistry

Material Science