The effects of solvent on the properties of sol-gel derived PZT thin film

Ji Yun Jung, Woo Sik Kim, Hyung Ho Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Pb(Zr,Ti)O3 (PZT) thin films have been actively investigated for use in nonvolatile memory devices, piezoelectric sensors, pyroelectric infrared detectors and surface acoustic wave (SAW) devices etc. To fabricate PZT thin film, sol-gel method has been commonly used because of its several advantages such as ease of composition control, high purity, and low processing temperature. In sol-gel processing, it was reported that the solvent of stock solution strongly effects the final properties of PZT thin film. However, a solvent for stock solution is limited from the consideration of reaction with precursor. 2-methoxyethanol has been generally used due to its high reactivity. However, to improve the density of film, solvent with light molecular weight is more desirable. Even though the solvents with light molecular weight has the advantage, those have been rarely used as solvent because it is difficult to control the reaction kinetic between the solvent and precursor alkoxide. Due to the limitations mentioned above, there were few reports about the sol-gel derived PZT thin films using light alcohol such as methanol and ethanol. Moreover, comparing the effects of various solvents to final PZT films has never been reported. Therefore, in this work the authors study the effects of the solvent on the properties of PZT films.

Original languageEnglish
Title of host publicationDigest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages222-223
Number of pages2
ISBN (Electronic)4891140046, 9784891140045
DOIs
Publication statusPublished - 2000 Jan 1
EventInternational Microprocesses and Nanotechnology Conference, MNC 2000 - Tokyo, Japan
Duration: 2000 Jul 112000 Jul 13

Other

OtherInternational Microprocesses and Nanotechnology Conference, MNC 2000
CountryJapan
CityTokyo
Period00/7/1100/7/13

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All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Jung, J. Y., Kim, W. S., & Park, H. H. (2000). The effects of solvent on the properties of sol-gel derived PZT thin film. In Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000 (pp. 222-223). [872723] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.2000.872723