The effects of surface modification on the electrical properties of p-n+ junction silicon nanowires grown by an aqueous electroless etching method

Seulah Lee, Ja Hoon Koo, Jungmok Seo, Sung Dae Kim, Kwang Hyun Lee, Seongil Im, Young Woon Kim, Taeyoon Lee

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4 Citations (Scopus)


Although the aqueous electroless etching (AEE) method has received significant attention for the fabrication of silicon nanowires (SiNWs) due to its simplicity and effectiveness, SiNWs grown via theAEE method have a drawback in that their surface roughness is considerably high. Thus, we fabricated surface-modified p-n+ junction SiNWs grown byAEE, wherein the surface roughness was reduced by a sequential processes of oxide growth using the rapid thermal oxidation (RTO) cycling process and oxideremoval with a hydrofluoric acid solution. Highresolution transmission electron microscopy analysisconfirmed that the surface roughness of the modified SiNWs was significantly decreased compared with that of the as-fabricated SiNWs. After RTO treatment, the wettability of the SiNWs had dramatically changed from superhydrophilic to superhydrophobic, which can be attributed to the formation of siloxane groups on the native oxide/SiNW surfaces and the effect of the nanoscale structure. Due to the enhancement in surface carrier mobility, the current density of thesurface-modified p-n+ junction SiNWs was approximately 6.3-fold greater than that of the as-fabricated sample at a forward bias of 4 V. Meanwhile, the photocurrent density of the surface-modified p-n +junction SiNWs was considerably decreased as a result of the decreases in the light absorption area, light absorption volume, and light scattering.

Original languageEnglish
Article number840
JournalJournal of Nanoparticle Research
Issue number5
Publication statusPublished - 2012 May

Bibliographical note

Funding Information:
Acknowledgments This study was supported in part by the Priority Research Centers Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (MEST) (2009-0093823) and the Converging Research Center Program through the Ministry of Education, Science and Technology (2011K000631). This study was also supported by the KARI-University Partnership program and an appointment to Mid-career Researcher Program at the NRF administered by the MEST (2009-0080290).

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Atomic and Molecular Physics, and Optics
  • Chemistry(all)
  • Modelling and Simulation
  • Materials Science(all)
  • Condensed Matter Physics


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