The impact of atomic layer deposited SiO2 passivation for high-k Ta1-xZrxO on the InP substrate

Chandreswar Mahata, Il Kwon Oh, Chang Mo Yoon, Chang Wan Lee, Jungmok Seo, Hassan Algadi, Mi Hyang Sheen, Young Woon Kim, Hyungjun Kim, Taeyoon Lee

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11 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds