The interactions between Si/Co films and GaAs(001) substrates

J. S. Kwak, H. K. Baik, D. W. Shin, C. G. Park, C. S. Kim, S. K. Noh, S. I. Kim

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Abstract

Interfacial reactions of Si/Co films on (001) oriented GaAs substrate, in the temperature range 300-700°C for 30 min, have been investigated using a combination of x-ray diffraction, Auger electron spectroscopy, and transmission electron microscopy. Cobalt starts to react with GaAs and Si at 380°C by formation of Co2GaAs, and Co2Si phases, respectively. At 420°C, the entire layer of Co is consumed, and the layer structure is observed with the sequence Si/CoSi/CoGa(CoAs)/Co2GaAs/GaAs. Contacts produced in this annealing regime are rectifying and the Schottky barrier heights increase from 0.69 eV(as-deposited state) up to 0.81 eV (420°C). In the subsequent reaction, CoSi grows at the expense of the decompositions of CoGa and CoAs at 460°C. In addition, the ternary phase also is decomposed and only the CoSi phase remains upon the GaAs surface at 600°C. Contacts produced at higher temperature regime (>460°C) have low barriers. The interface between CoSi and GaAs is stable up to 700°C. The results of interfacial reactions can be understood from the calculated Si-Co-Ga-As quaternary phase diagram.

Original languageEnglish
Pages (from-to)1335-1341
Number of pages7
JournalJournal of Electronic Materials
Volume23
Issue number12
DOIs
Publication statusPublished - 1994 Dec 1

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Kwak, J. S., Baik, H. K., Shin, D. W., Park, C. G., Kim, C. S., Noh, S. K., & Kim, S. I. (1994). The interactions between Si/Co films and GaAs(001) substrates. Journal of Electronic Materials, 23(12), 1335-1341. https://doi.org/10.1007/BF02649899